Microsensors and Microelectromechanical Systems
FEKT-BPC-MMSAcad. year: 2020/2021
Introduction into microsensors, general calsification and parameters, and microelectromechanical systems (MEMS). Fundamentals of microelectronic technologies and MEMS technology. Fundamentals of phenomenas in materials including semiconductors and their exploiting in sensors. Resistive, capacitive and inductance microsensors including MEMS solution (position, pressure, temperature, acceleration, ....). Magnetoelectric sensors and Hall's probes. Generating sensors based on thermoelectric, piezoelectric, and inductive principle. Optical and CCD sensors. Light emission sensor generators. Chemical and biochemical sensors (conductometric, pH sensors, lambda probe, enzymatic sensors, ...). New trends in microsensors and MEMS.
Learning outcomes of the course unit
Fundamental knowledge of theory and earning practical skills how to design microelectromechanical systems, microsensors and to apply methods of non-electrical quantities measurement, methodology and evaluation.
The subject knowledge on the secondary school level is required.
Recommended optional programme components
Recommended or required reading
HUBÁLEK, J.; DRBOHLAVOVÁ, J.; PRÁŠEK, J.; BUŠINOVÁ, P.; BENDOVÁ, M. Mikrosenzory a mikroelektromechanické systémy. Brno: 2012. (CS)
HUBÁLEK, J.; PRÁŠEK, J.; PEKÁRKOVÁ, J; BENDOVÁ, M.; DRBOHLAVOVÁ, J.; MAJZLÍKOVÁ, P. Microsensors and Microelectromechanical Systems. Brno: 2015. (EN)
Planned learning activities and teaching methods
Teaching methods depend on the type of course unit as specified in the article 7 of BUT Rules for Studies and Examinations.
It is including:
lectures using form of technical seminary;
self-reliant practice laboratory exercise including preparation and elaboration of report;
using LMS Moodle, practical demonstration, visit of research laboratory LABSENSNANO.
Assesment methods and criteria linked to learning outcomes
Requirements for completion of a course are specified by a regulation issued by the lecturer responsible for the course and updated for every.
Language of instruction
1. Introduction to sensor technics
2. Fundametals of microelectronics technology
3. MicroElectroMechanical Systems (MEMS
4. Resistive sensors
5. Capacitive sensors
6. Inductance sensors
7. Generating sensors
8. Semicoductive sensors
9. Optical sensors
10. Special sensors
11. Chcemical sensors and biosensors
Target of the course is to present theory, principles and design of microsensors and microelectromechanical systems (MEMS), to train how to design microsystems and their application.
Specification of controlled education, way of implementation and compensation for absences
The content and forms of instruction in the evaluated course are specified by a regulation issued by the lecturer responsible for the course and updated for every academic year.
Classification of course in study plans