Publication detail

Analysis of the gas flow

LEPLTOVÁ, K. MAXA, J. NEDĚLA, V. VYROUBAL, P. VACULÍK, S. HLAVATÁ, P.

Original Title

Analysis of the gas flow

English Title

Analysis of the gas flow

Type

conference paper

Language

en

Original Abstract

In order to optimize the shape of the differentially pumped chamber in the area of the primary electron beam passage for the current concept of the location of the foci of the primary electron beam, it was necessary to adapt to the size and shape of the limitations of the existing structure.

English abstract

In order to optimize the shape of the differentially pumped chamber in the area of the primary electron beam passage for the current concept of the location of the foci of the primary electron beam, it was necessary to adapt to the size and shape of the limitations of the existing structure.

Keywords

finite volume method, simulation, gas flow

Released

26.08.2014

Publisher

Brno: Tribun EU s. r. o.

Location

Mikulov

ISBN

978-80-87441-12-1

Book

Workshop of Interesting Topics of SEM and ESEM

Pages from

46

Pages to

48

Pages count

3

BibTex


@inproceedings{BUT110470,
  author="Kristýna {Lepltová} and Jiří {Maxa} and Vilém {Neděla} and Petr {Vyroubal} and Sebastian {Vaculík} and Pavla {Šabacká}",
  title="Analysis of the gas flow",
  annote="In order to optimize the shape of the differentially pumped chamber in the area of the primary electron beam passage for the current concept of the location of the foci of the primary electron beam, it was necessary to adapt to the size and shape of the limitations of the existing structure.",
  address="Brno: Tribun EU s. r. o.",
  booktitle="Workshop of Interesting Topics of SEM and ESEM",
  chapter="110470",
  howpublished="print",
  institution="Brno: Tribun EU s. r. o.",
  year="2014",
  month="august",
  pages="46--48",
  publisher="Brno: Tribun EU s. r. o.",
  type="conference paper"
}