Detail publikace

Analysis of the gas flow

Originální název

Analysis of the gas flow

Anglický název

Analysis of the gas flow

Jazyk

en

Originální abstrakt

In order to optimize the shape of the differentially pumped chamber in the area of the primary electron beam passage for the current concept of the location of the foci of the primary electron beam, it was necessary to adapt to the size and shape of the limitations of the existing structure.

Anglický abstrakt

In order to optimize the shape of the differentially pumped chamber in the area of the primary electron beam passage for the current concept of the location of the foci of the primary electron beam, it was necessary to adapt to the size and shape of the limitations of the existing structure.

Dokumenty

BibTex


@inproceedings{BUT110470,
  author="Kristýna {Lepltová} and Jiří {Maxa} and Vilém {Neděla} and Petr {Vyroubal} and Sebastian {Vaculík} and Pavla {Šabacká}",
  title="Analysis of the gas flow",
  annote="In order to optimize the shape of the differentially pumped chamber in the area of the primary electron beam passage for the current concept of the location of the foci of the primary electron beam, it was necessary to adapt to the size and shape of the limitations of the existing structure.",
  address="Brno: Tribun EU s. r. o.",
  booktitle="Workshop of Interesting Topics of SEM and ESEM",
  chapter="110470",
  howpublished="print",
  institution="Brno: Tribun EU s. r. o.",
  year="2014",
  month="august",
  pages="46--48",
  publisher="Brno: Tribun EU s. r. o.",
  type="conference paper"
}