Publication detail

MEMS Carbon Nanotubes Field Emission Pressure Sensor with simplified design: performance and field emission properties study

PEKÁREK, J. VRBA, R. PRÁŠEK, J. JAŠEK, O. MAJZLÍKOVÁ, P. PEKÁRKOVÁ, J. ZAJÍČKOVÁ, L.

Original Title

MEMS Carbon Nanotubes Field Emission Pressure Sensor with simplified design: performance and field emission properties study

English Title

MEMS Carbon Nanotubes Field Emission Pressure Sensor with simplified design: performance and field emission properties study

Type

journal article in Web of Science

Language

en

Original Abstract

The pressure sensor application gained recently substantial interest in many fields of basic and applied research and applications. In our work microelectromechanical system based pressure sensor contains nanostructured electrode consisting of carbon nanotube array. Carbon nanotubes are directly grown on such electrode by plasma enhanced chemical vapor deposition method using microwave plasma torch at atmospheric pressure. This growth method enables us to use much simple electrode structure without need of buffer layer and time-consuming lithography process. Combination of carbon nanotubes field emission and MEMS membrane mechanical properties make possible to enhance sensitivity of the sensor. Field emission properties of carbon nanotubes are measured by newly developed system enabling us precise measurement of expecting properties such as dependence on diaphragm (upper electrode) distance, applied voltage and stability of the sensor. Measured values are compared to numerical modeling of the membrane system in CoventorWare software by finite element method. We also suggest to encapsulate the sensor using glass frit bonding because such method is more suitable for high vacuum requirements of the field emission operation.

English abstract

The pressure sensor application gained recently substantial interest in many fields of basic and applied research and applications. In our work microelectromechanical system based pressure sensor contains nanostructured electrode consisting of carbon nanotube array. Carbon nanotubes are directly grown on such electrode by plasma enhanced chemical vapor deposition method using microwave plasma torch at atmospheric pressure. This growth method enables us to use much simple electrode structure without need of buffer layer and time-consuming lithography process. Combination of carbon nanotubes field emission and MEMS membrane mechanical properties make possible to enhance sensitivity of the sensor. Field emission properties of carbon nanotubes are measured by newly developed system enabling us precise measurement of expecting properties such as dependence on diaphragm (upper electrode) distance, applied voltage and stability of the sensor. Measured values are compared to numerical modeling of the membrane system in CoventorWare software by finite element method. We also suggest to encapsulate the sensor using glass frit bonding because such method is more suitable for high vacuum requirements of the field emission operation.

Keywords

carbon nanotubes, field emitter arrays, microelectromechanical systems, microwave torch

RIV year

2015

Released

01.03.2015

Publisher

IEEE Sensors Council

Location

445 Hoes Lane, Piscataway, NJ 08855-4141 USA

Pages from

1430

Pages to

1436

Pages count

7

URL

BibTex


@article{BUT110024,
  author="Jan {Pekárek} and Radimír {Vrba} and Jan {Prášek} and Ondřej {Jašek} and Petra {Majzlíková} and Jana {Pekárková} and Lenka {Zajíčková}",
  title="MEMS Carbon Nanotubes Field Emission Pressure Sensor with simplified design: performance and field emission properties study",
  annote="The pressure sensor application gained recently substantial interest in many fields of basic and applied research and applications. In our work microelectromechanical system based pressure sensor contains nanostructured electrode consisting of carbon nanotube array. Carbon nanotubes are directly grown on such electrode by plasma enhanced chemical vapor deposition method using microwave plasma torch at atmospheric pressure. This growth method enables us to use much simple electrode structure without need of buffer layer and time-consuming lithography process. Combination of carbon nanotubes field emission and MEMS membrane mechanical properties make possible to enhance sensitivity of the sensor. Field emission properties of carbon nanotubes are measured by newly developed system enabling us precise measurement of expecting properties such as dependence on diaphragm (upper electrode) distance, applied voltage and stability of the sensor. Measured values are compared to numerical modeling of the membrane system in CoventorWare software by finite element method. We also suggest to encapsulate the sensor using glass frit bonding because such method is more suitable for high vacuum requirements of the field emission operation.",
  address="IEEE Sensors Council",
  chapter="110024",
  doi="10.1109/JSEN.2014.2363213",
  institution="IEEE Sensors Council",
  number="3",
  volume="15",
  year="2015",
  month="march",
  pages="1430--1436",
  publisher="IEEE Sensors Council",
  type="journal article in Web of Science"
}