Detail publikace

MEMS Carbon Nanotubes Field Emission Pressure Sensor with simplified design: performance and field emission properties study

PEKÁREK, J. VRBA, R. PRÁŠEK, J. JAŠEK, O. MAJZLÍKOVÁ, P. PEKÁRKOVÁ, J. ZAJÍČKOVÁ, L.

Originální název

MEMS Carbon Nanotubes Field Emission Pressure Sensor with simplified design: performance and field emission properties study

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

The pressure sensor application gained recently substantial interest in many fields of basic and applied research and applications. In our work microelectromechanical system based pressure sensor contains nanostructured electrode consisting of carbon nanotube array. Carbon nanotubes are directly grown on such electrode by plasma enhanced chemical vapor deposition method using microwave plasma torch at atmospheric pressure. This growth method enables us to use much simple electrode structure without need of buffer layer and time-consuming lithography process. Combination of carbon nanotubes field emission and MEMS membrane mechanical properties make possible to enhance sensitivity of the sensor. Field emission properties of carbon nanotubes are measured by newly developed system enabling us precise measurement of expecting properties such as dependence on diaphragm (upper electrode) distance, applied voltage and stability of the sensor. Measured values are compared to numerical modeling of the membrane system in CoventorWare software by finite element method. We also suggest to encapsulate the sensor using glass frit bonding because such method is more suitable for high vacuum requirements of the field emission operation.

Klíčová slova

carbon nanotubes, field emitter arrays, microelectromechanical systems, microwave torch

Autoři

PEKÁREK, J.; VRBA, R.; PRÁŠEK, J.; JAŠEK, O.; MAJZLÍKOVÁ, P.; PEKÁRKOVÁ, J.; ZAJÍČKOVÁ, L.

Rok RIV

2015

Vydáno

1. 3. 2015

Nakladatel

IEEE Sensors Council

Místo

445 Hoes Lane, Piscataway, NJ 08855-4141 USA

ISSN

1530-437X

Periodikum

IEEE SENSORS JOURNAL

Ročník

15

Číslo

3

Stát

Spojené státy americké

Strany od

1430

Strany do

1436

Strany počet

7

URL

http://dx.doi.org/10.1109/JSEN.2014.2363213

BibTex

@article{BUT110024,
  author="Jan {Pekárek} and Radimír {Vrba} and Jan {Prášek} and Ondřej {Jašek} and Petra {Majzlíková} and Jana {Pekárková} and Lenka {Zajíčková}",
  title="MEMS Carbon Nanotubes Field Emission Pressure Sensor with simplified design: performance and field emission properties study",
  journal="IEEE SENSORS JOURNAL",
  year="2015",
  volume="15",
  number="3",
  pages="1430--1436",
  doi="10.1109/JSEN.2014.2363213",
  issn="1530-437X",
  url="http://dx.doi.org/10.1109/JSEN.2014.2363213"
}