Publication detail

C-V Characterization of Nonlinear Capacitors Using CBCM Method

SUTORÝ, T. KOLKA, Z.

Original Title

C-V Characterization of Nonlinear Capacitors Using CBCM Method

English Title

C-V Characterization of Nonlinear Capacitors Using CBCM Method

Type

conference paper

Language

en

Original Abstract

The paper deals with a modification of CBCM (Charge-Based Capacitance Measurements) for nonlinear capacitance characterization. The method is characterized by high resolution although it is based on equipment found in any average laboratory. CBCM was originally developed for linear interconnect measurements. The proposed modification uses two DC swept sources to measure the whole nonlinear Q-v characteristic in both polarities without the necessity to switch the measured object. A test-chip implementing the method was designed and manufactured in 0.35μm CMOS process. Verification against known capacitances proved the method correctness and accuracy. It was successfully used for MOSCAPs characterization in full operating voltage range.

English abstract

The paper deals with a modification of CBCM (Charge-Based Capacitance Measurements) for nonlinear capacitance characterization. The method is characterized by high resolution although it is based on equipment found in any average laboratory. CBCM was originally developed for linear interconnect measurements. The proposed modification uses two DC swept sources to measure the whole nonlinear Q-v characteristic in both polarities without the necessity to switch the measured object. A test-chip implementing the method was designed and manufactured in 0.35μm CMOS process. Verification against known capacitances proved the method correctness and accuracy. It was successfully used for MOSCAPs characterization in full operating voltage range.

Keywords

Microelectronics, CBCM, testing

RIV year

2007

Released

21.06.2007

Publisher

Technical University of Lodz

Location

Lodž, Poland

ISBN

83-922632-9-4

Book

Proceedings of the 14th International Conference Mixed Design of Integrated Circuits and Systems 2007

Pages from

501

Pages to

505

Pages count

5

Documents

BibTex


@inproceedings{BUT23667,
  author="Tomáš {Sutorý} and Zdeněk {Kolka}",
  title="C-V Characterization of Nonlinear Capacitors Using CBCM Method",
  annote="The paper deals with a modification of CBCM (Charge-Based Capacitance Measurements) for nonlinear
capacitance characterization. The method is characterized by high resolution although it is based on equipment found in
any average laboratory. CBCM was originally developed for linear interconnect measurements. The proposed modification
uses two DC swept sources to measure the whole nonlinear Q-v characteristic in both polarities without the necessity to
switch the measured object. A test-chip implementing the method was designed and manufactured in 0.35μm CMOS
process. Verification against known capacitances proved the method correctness and accuracy. It was successfully used for
MOSCAPs characterization in full operating voltage range.",
  address="Technical University of Lodz",
  booktitle="Proceedings of the 14th International Conference Mixed Design of Integrated Circuits and Systems 2007",
  chapter="23667",
  institution="Technical University of Lodz",
  year="2007",
  month="june",
  pages="501",
  publisher="Technical University of Lodz",
  type="conference paper"
}