Publication detail

Molybdenum diselenide thin films grown by atomic layer deposition: An XPS analysis

RODRIGUEZ PEREIRA, J. ZAZPE, R. CHARVOT, J. BUREŠ, F. MACÁK, J.

Original Title

Molybdenum diselenide thin films grown by atomic layer deposition: An XPS analysis

Type

journal article in Web of Science

Language

English

Original Abstract

Molybdenum diselenide (MoSe2) thin films were deposited on annealed titanium foils by atomic layer deposition using suitable precursors. In this paper, a detailed x-ray photoelectron spectroscopy analysis of the MoSe2 film is presented. Survey spectra, Mo 3d, Se 3d, Mo 3p, Se LMM, Se 3p, C 1s, and Se 4s core level along with the valence band spectra were measured. Quantitative analysis indicates a surface composition of MoSe1.8, suggesting a deficiency of selenium on the surface.

Keywords

MoSe2; transition metal dichalcogenides; thin films; 2D material; XPS

Authors

RODRIGUEZ PEREIRA, J.; ZAZPE, R.; CHARVOT, J.; BUREŠ, F.; MACÁK, J.

Released

1. 12. 2020

Publisher

AMER INST PHYSICS

Location

MELVILLE

ISBN

1055-5269

Periodical

Surface Science Spectra

Year of study

27

Number

2

State

United States of America

Pages from

024006-1

Pages to

024006-8

Pages count

8

URL

https://avs.scitation.org/doi/10.1116/6.0000354