Publication detail

AFM-in-SEM as a Tool for Comprehensive Sample Surface Analysis

NOVOTNÁ, V., HORÁK, J., KONEČNÝ, M., HEGROVÁ, V., NOVOTNÝ, O., NOVÁČEK, Z., NEUMAN, J.

Original Title

AFM-in-SEM as a Tool for Comprehensive Sample Surface Analysis

Type

journal article - other

Language

English

Original Abstract

Key features and applications of a unique atomic force microscope (AFM), the LiteScope™, which can be integrated into a scanning electron microscope (SEM) is reported. Using the AFM-in-SEM as one tool combines the capabilities of both systems in a very efficient way. The LiteScope design features advanced Correlative Probe and Electron Microscopy (CPEM)™ imaging technology that allows simultaneous acquisition of multiple AFM and SEM signals and their precise in-time correlation into a 3D CPEM view. AFM-in-SEM advantages are presented using several examples of applications and AFM measurement modes including CPEM, material electrical and mechanical properties together with nanoindentation, and focused ion beam (FIB) applications.

Keywords

atomic force microscopy; scanning electron microscopy; correlative microscopy; AFM-in-SEM; nanoindentation

Authors

NOVOTNÁ, V., HORÁK, J., KONEČNÝ, M., HEGROVÁ, V., NOVOTNÝ, O., NOVÁČEK, Z., NEUMAN, J.

Released

18. 5. 2020

ISBN

2150-3583

Periodical

Microscopy Today

Year of study

28

Number

3

State

United Kingdom of Great Britain and Northern Ireland

Pages from

38

Pages to

46

Pages count

9

URL

https://doi.org/10.1017/S1551929520000875

BibTex

@article{BUT164118,
  author="Martin {Konečný}",
  title="AFM-in-SEM as a Tool for Comprehensive Sample Surface Analysis",
  journal="Microscopy Today",
  year="2020",
  volume="28",
  number="3",
  pages="38--46",
  doi="10.1017/S1551929520000875",
  issn="2150-3583",
  url="https://doi.org/10.1017/S1551929520000875"
}