Detail publikace

AFM-in-SEM as a Tool for Comprehensive Sample Surface Analysis

NOVOTNÁ, V., HORÁK, J., KONEČNÝ, M., HEGROVÁ, V., NOVOTNÝ, O., NOVÁČEK, Z., NEUMAN, J.

Originální název

AFM-in-SEM as a Tool for Comprehensive Sample Surface Analysis

Typ

článek v časopise - ostatní, Jost

Jazyk

angličtina

Originální abstrakt

Key features and applications of a unique atomic force microscope (AFM), the LiteScope™, which can be integrated into a scanning electron microscope (SEM) is reported. Using the AFM-in-SEM as one tool combines the capabilities of both systems in a very efficient way. The LiteScope design features advanced Correlative Probe and Electron Microscopy (CPEM)™ imaging technology that allows simultaneous acquisition of multiple AFM and SEM signals and their precise in-time correlation into a 3D CPEM view. AFM-in-SEM advantages are presented using several examples of applications and AFM measurement modes including CPEM, material electrical and mechanical properties together with nanoindentation, and focused ion beam (FIB) applications.

Klíčová slova

atomic force microscopy; scanning electron microscopy; correlative microscopy; AFM-in-SEM; nanoindentation

Autoři

NOVOTNÁ, V., HORÁK, J., KONEČNÝ, M., HEGROVÁ, V., NOVOTNÝ, O., NOVÁČEK, Z., NEUMAN, J.

Vydáno

18. 5. 2020

ISSN

2150-3583

Periodikum

Microscopy Today

Ročník

28

Číslo

3

Stát

Spojené království Velké Británie a Severního Irska

Strany od

38

Strany do

46

Strany počet

9

URL

https://doi.org/10.1017/S1551929520000875

BibTex

@article{BUT164118,
  author="Martin {Konečný}",
  title="AFM-in-SEM as a Tool for Comprehensive Sample Surface Analysis",
  journal="Microscopy Today",
  year="2020",
  volume="28",
  number="3",
  pages="38--46",
  doi="10.1017/S1551929520000875",
  issn="2150-3583",
  url="https://doi.org/10.1017/S1551929520000875"
}