Correlative imaging is an emerging paradigm which allows simultaneous capture of surface signals from two different probes - typically surface topography from AFM and the complementary signal from SEM. The main obstacle is the widely disparate resolution of both methods (approx. 1 nm for AFM but 100 nm for cathodoluminescence imaging). In this project, we will develop a new approach to correlative imaging of threading dislocations in III-nitride semiconductors, which will provide detailed information about the structure and optical activity of these defects.

STI-J-17-4388

Czech

Vacek Petr, Ing., Ph.D. - principal person responsible
Gröger Roman, doc. Ing., Ph.D. et Ph.D. - fellow researcher

Central European Institute of Technology BUT
- responsible department (24.5.2017 - not assigned)
Central European Institute of Technology BUT
- beneficiary (1.1.2017 - 31.12.2017)

VACEK, P.; KOSTELNÍK, P.; GRÖGER, R. Correlation of Structure and EBIC Contrast from Threading Dislocations in AlN/Si Films. PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2019, vol. 256, no. 11, p. 1900279-1900279. ISSN: 0370-1972.
Detail

Responsibility: Vacek Petr, Ing., Ph.D.