Detail publikace

PECVD of hexamethyldisiloxane: Pulsed mode

BLAHOVÁ, L. PROCHÁZKA, M. KRČMA, F.

Originální název

PECVD of hexamethyldisiloxane: Pulsed mode

Anglický název

PECVD of hexamethyldisiloxane: Pulsed mode

Jazyk

en

Originální abstrakt

PECVD of hexamethyldisiloxane was performed in order to study dependence of the process on duty cycle. Capacitively coupled plasma was measured via optical emission spectroscopy. Experiment shows that dependence of fragment populations on duty cycle was increasing with increasing duty cycle in the case of constant supplied power, however, there was a maximum detected at 30 % in the case of constant mean power. This point might be an optimal setup for the deposition of SiO2 thin films from hexamethyldisiloxane.

Anglický abstrakt

PECVD of hexamethyldisiloxane was performed in order to study dependence of the process on duty cycle. Capacitively coupled plasma was measured via optical emission spectroscopy. Experiment shows that dependence of fragment populations on duty cycle was increasing with increasing duty cycle in the case of constant supplied power, however, there was a maximum detected at 30 % in the case of constant mean power. This point might be an optimal setup for the deposition of SiO2 thin films from hexamethyldisiloxane.

Dokumenty

BibTex


@inproceedings{BUT73654,
  author="Lucie {Blahová} and Michal {Procházka} and František {Krčma}",
  title="PECVD of hexamethyldisiloxane: Pulsed mode",
  annote="PECVD of hexamethyldisiloxane was performed in order to study dependence of the process on duty cycle. Capacitively coupled plasma was measured via optical emission spectroscopy. Experiment shows that dependence of fragment populations on duty cycle was increasing with increasing duty cycle in the case of constant supplied power, however, there was a maximum detected at 30 % in the case of constant mean power. This point might be an optimal setup for the deposition of SiO2 thin films from hexamethyldisiloxane.",
  address="Fizicki fakultet Beograd",
  booktitle="CESPC IV Book of Abstracts",
  chapter="73654",
  howpublished="online",
  institution="Fizicki fakultet Beograd",
  year="2011",
  month="august",
  pages="111--112",
  publisher="Fizicki fakultet Beograd",
  type="conference paper"
}