Detail publikace

Ion Scattering Spectrosopy - A Tool for Surface Analysis.

PRŮŠA, S., ŠIKOLA, T., VOBORNÝ, S., BÁBOR, P.

Originální název

Ion Scattering Spectrosopy - A Tool for Surface Analysis.

Anglický název

Ion Scattering Spectrosopy - A Tool for Surface Analysis.

Jazyk

en

Originální abstrakt

Ion Scattering Spectroscopy (ISS) is one of the analytical techniques which are developed and used at the institute surface science group for chemical composition analysis of solid state surfaces and thin films. The chemical composition is calculated from the time of flight spectrum of noble gases ions scattered on the examined surfaces. Their energy after scattering is measured by two meters long drift tube ended by a particle detector. Two typical experimental results measured on Cu/SiO2 and Ga/SiO2 samples are discussed.

Anglický abstrakt

Ion Scattering Spectroscopy (ISS) is one of the analytical techniques which are developed and used at the institute surface science group for chemical composition analysis of solid state surfaces and thin films. The chemical composition is calculated from the time of flight spectrum of noble gases ions scattered on the examined surfaces. Their energy after scattering is measured by two meters long drift tube ended by a particle detector. Two typical experimental results measured on Cu/SiO2 and Ga/SiO2 samples are discussed.

Dokumenty

BibTex


@inproceedings{BUT3354,
  author="Stanislav {Průša} and Tomáš {Šikola} and Stanislav {Voborný} and Petr {Bábor}",
  title="Ion Scattering Spectrosopy - A Tool for Surface Analysis.",
  annote="Ion Scattering Spectroscopy (ISS) is one of the analytical techniques which are developed and used at the institute surface science group for chemical composition analysis of solid state surfaces and thin films. The chemical composition is calculated from the time of flight spectrum of noble gases ions scattered on the examined surfaces. Their energy after scattering is measured by two meters long drift tube ended by a particle detector. Two typical experimental results measured on Cu/SiO2 and Ga/SiO2 samples are discussed.",
  address="Fakulta strojního inženýrství VUT v Brně",
  booktitle="Juniormat '01 sborník",
  chapter="3354",
  institution="Fakulta strojního inženýrství VUT v Brně",
  year="2001",
  month="september",
  pages="86",
  publisher="Fakulta strojního inženýrství VUT v Brně",
  type="conference paper"
}