Publication detail

Ion Scattering Spectrosopy - A Tool for Surface Analysis.

PRŮŠA, S., ŠIKOLA, T., VOBORNÝ, S., BÁBOR, P.

Original Title

Ion Scattering Spectrosopy - A Tool for Surface Analysis.

English Title

Ion Scattering Spectrosopy - A Tool for Surface Analysis.

Type

conference paper

Language

en

Original Abstract

Ion Scattering Spectroscopy (ISS) is one of the analytical techniques which are developed and used at the institute surface science group for chemical composition analysis of solid state surfaces and thin films. The chemical composition is calculated from the time of flight spectrum of noble gases ions scattered on the examined surfaces. Their energy after scattering is measured by two meters long drift tube ended by a particle detector. Two typical experimental results measured on Cu/SiO2 and Ga/SiO2 samples are discussed.

English abstract

Ion Scattering Spectroscopy (ISS) is one of the analytical techniques which are developed and used at the institute surface science group for chemical composition analysis of solid state surfaces and thin films. The chemical composition is calculated from the time of flight spectrum of noble gases ions scattered on the examined surfaces. Their energy after scattering is measured by two meters long drift tube ended by a particle detector. Two typical experimental results measured on Cu/SiO2 and Ga/SiO2 samples are discussed.

RIV year

2001

Released

19.09.2001

Publisher

Fakulta strojního inženýrství VUT v Brně

Location

Brno

Pages from

86

Pages to

90

Pages count

5

Documents

BibTex


@inproceedings{BUT3354,
  author="Stanislav {Průša} and Tomáš {Šikola} and Stanislav {Voborný} and Petr {Bábor}",
  title="Ion Scattering Spectrosopy - A Tool for Surface Analysis.",
  annote="Ion Scattering Spectroscopy (ISS) is one of the analytical techniques which are developed and used at the institute surface science group for chemical composition analysis of solid state surfaces and thin films. The chemical composition is calculated from the time of flight spectrum of noble gases ions scattered on the examined surfaces. Their energy after scattering is measured by two meters long drift tube ended by a particle detector. Two typical experimental results measured on Cu/SiO2 and Ga/SiO2 samples are discussed.",
  address="Fakulta strojního inženýrství VUT v Brně",
  booktitle="Juniormat '01 sborník",
  chapter="3354",
  institution="Fakulta strojního inženýrství VUT v Brně",
  year="2001",
  month="september",
  pages="86",
  publisher="Fakulta strojního inženýrství VUT v Brně",
  type="conference paper"
}