Detail publikace

The Nanolithography Toolbox

BALRAM, KC WESTLY,DA DAVANCO,M GRUTTER,KE LI,Q MICHELS,T RAY,CH YU,LY KASICA,RJ WALLIN,CB GILBERT,IJ BRYCE,BA SIMELGOR,G TOPOLANCIK,J LOBONTIU,N LIU,YX NEUZIL,P SVATOS,V DILL,KA BERTRAND,NA METZLER,MG LOPEZ,G CZAPLEWSKI,DA OCOLA,L SRINIVASAN,KA STAVIS,SM AKSYUK,VA LIDDLE, JA KRYLOV,S ILIC, BR.

Originální název

The Nanolithography Toolbox

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

This article introduces in archival form the Nanolithography Toolbox, a platform-independent software package for scripted lithography pattern layout generation. The Center for Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST) developed the Nanolithography Toolbox to help users of the CNST NanoFab design devices with complex curves and aggressive critical dimensions. Using parameterized shapes as building blocks, the Nanolithography Toolbox allows users to rapidly design and layout nanoscale devices of arbitrary complexity through scripting and programming. The Toolbox offers many parameterized shapes, including structure libraries for micro-and nanoelectromechanical systems (MEMS and NEMS) and nanophotonic devices.

Klíčová slova

CAD; lithography; nanofabrication; nanofluidic; nanophotonic; nanoplasmonic; nanoscale curved features; nanoscale design; nanoscale devices

Autoři

BALRAM, KC; WESTLY,DA; DAVANCO,M; GRUTTER,KE; LI,Q; MICHELS,T; RAY,CH; YU,LY; KASICA,RJ; WALLIN,CB; GILBERT,IJ; BRYCE,BA; SIMELGOR,G; TOPOLANCIK,J; LOBONTIU,N; LIU,YX; NEUZIL,P; SVATOS,V; DILL,KA; BERTRAND,NA; METZLER,MG; LOPEZ,G; CZAPLEWSKI,DA; OCOLA,L; SRINIVASAN,KA; STAVIS,SM; AKSYUK,VA; LIDDLE, JA; KRYLOV,S; ILIC, BR.

Vydáno

19. 10. 2016

Nakladatel

US GOVERNMENT PRINTING OFFICE

Místo

WASHINGTON, DC 20402-9325 USA

ISSN

1044-677X

Periodikum

JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY

Ročník

121

Číslo

1

Stát

Spojené státy americké

Strany od

464

Strany do

475

Strany počet

11

URL

https://apps.webofknowledge.com/full_record.do?product=WOS&search_mode=GeneralSearch&qid=4&SID=W2hKFfHmgNk3xhiPDY1&page=1&doc=1

BibTex

@article{BUT130237,
  author="BALRAM, KC and WESTLY,DA and DAVANCO,M and GRUTTER,KE and LI,Q and MICHELS,T and RAY,CH and YU,LY and KASICA,RJ and WALLIN,CB and GILBERT,IJ and BRYCE,BA and SIMELGOR,G and TOPOLANCIK,J and LOBONTIU,N and LIU,YX and NEUZIL,P and SVATOS,V and DILL,KA and BERTRAND,NA and METZLER,MG and LOPEZ,G and CZAPLEWSKI,DA and OCOLA,L and SRINIVASAN,KA and STAVIS,SM and AKSYUK,VA and LIDDLE, JA and KRYLOV,S and ILIC, BR.",
  title="The Nanolithography Toolbox",
  journal="JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY",
  year="2016",
  volume="121",
  number="1",
  pages="464--475",
  doi="10.6028/jres.121.024",
  issn="1044-677X",
  url="https://apps.webofknowledge.com/full_record.do?product=WOS&search_mode=GeneralSearch&qid=4&SID=W2hKFfHmgNk3xhiPDY1&page=1&doc=1"
}