Detail publikace

The Nanolithography Toolbox

BALRAM, KC WESTLY,DA DAVANCO,M GRUTTER,KE LI,Q MICHELS,T RAY,CH YU,LY KASICA,RJ WALLIN,CB GILBERT,IJ BRYCE,BA SIMELGOR,G TOPOLANCIK,J LOBONTIU,N LIU,YX NEUZIL,P SVATOS,V DILL,KA BERTRAND,NA METZLER,MG LOPEZ,G CZAPLEWSKI,DA OCOLA,L SRINIVASAN,KA STAVIS,SM AKSYUK,VA LIDDLE, JA KRYLOV,S ILIC, BR.

Originální název

The Nanolithography Toolbox

Anglický název

The Nanolithography Toolbox

Jazyk

en

Originální abstrakt

This article introduces in archival form the Nanolithography Toolbox, a platform-independent software package for scripted lithography pattern layout generation. The Center for Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST) developed the Nanolithography Toolbox to help users of the CNST NanoFab design devices with complex curves and aggressive critical dimensions. Using parameterized shapes as building blocks, the Nanolithography Toolbox allows users to rapidly design and layout nanoscale devices of arbitrary complexity through scripting and programming. The Toolbox offers many parameterized shapes, including structure libraries for micro-and nanoelectromechanical systems (MEMS and NEMS) and nanophotonic devices.

Anglický abstrakt

This article introduces in archival form the Nanolithography Toolbox, a platform-independent software package for scripted lithography pattern layout generation. The Center for Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST) developed the Nanolithography Toolbox to help users of the CNST NanoFab design devices with complex curves and aggressive critical dimensions. Using parameterized shapes as building blocks, the Nanolithography Toolbox allows users to rapidly design and layout nanoscale devices of arbitrary complexity through scripting and programming. The Toolbox offers many parameterized shapes, including structure libraries for micro-and nanoelectromechanical systems (MEMS and NEMS) and nanophotonic devices.

Dokumenty

BibTex


@article{BUT130237,
  author="Vojtěch {Svatoš} and Pavel {Neužil}",
  title="The Nanolithography Toolbox",
  annote="This article introduces in archival form the Nanolithography Toolbox, a platform-independent software package for scripted lithography pattern layout generation. The Center for Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST) developed the Nanolithography Toolbox to help users of the CNST NanoFab design devices with complex curves and aggressive critical dimensions. Using parameterized shapes as building blocks, the Nanolithography Toolbox allows users to rapidly design and layout nanoscale devices of arbitrary complexity through scripting and programming. The Toolbox offers many parameterized shapes, including structure libraries for micro-and nanoelectromechanical systems (MEMS and NEMS) and nanophotonic devices.",
  address="US GOVERNMENT PRINTING OFFICE",
  chapter="130237",
  doi="10.6028/jres.121.024",
  howpublished="online",
  institution="US GOVERNMENT PRINTING OFFICE",
  number="1",
  volume="121",
  year="2016",
  month="october",
  pages="464--475",
  publisher="US GOVERNMENT PRINTING OFFICE",
  type="journal article in Web of Science"
}