Detail publikace

Film Thickness Measurement and Surface Characterization by Optical Profilometer MicroProf FRT

Originální název

Film Thickness Measurement and Surface Characterization by Optical Profilometer MicroProf FRT

Anglický název

Film Thickness Measurement and Surface Characterization by Optical Profilometer MicroProf FRT

Jazyk

en

Originální abstrakt

This paper compares Chromatic White Light (CWL) and stylus profilometer measurements in an attempt to determine the capabilities of the non-contact CWL method for thickness measurements of thin soft organic films. It was found that the CWL technique is proper for a measurement of thin soft organic films with higher than 40-50 nm film thicknesses. As a complementary feature of the method 2D and 3D surface morphology imaging of the films were recorded and processed by digital calculations and Fourier filtering.

Anglický abstrakt

This paper compares Chromatic White Light (CWL) and stylus profilometer measurements in an attempt to determine the capabilities of the non-contact CWL method for thickness measurements of thin soft organic films. It was found that the CWL technique is proper for a measurement of thin soft organic films with higher than 40-50 nm film thicknesses. As a complementary feature of the method 2D and 3D surface morphology imaging of the films were recorded and processed by digital calculations and Fourier filtering.

BibTex


@misc{BUT102465,
  author="Vasil {Siderov} and Daniela {Mladenova} and Viktor {Milenkov} and Miloslav {Ohlídal} and Ota {Salyk} and Martin {Weiter} and Ivaylo {Zhivkov}",
  title="Film Thickness Measurement and Surface Characterization by Optical Profilometer MicroProf FRT",
  annote="This paper compares Chromatic White Light (CWL) and stylus profilometer measurements in an attempt to determine the capabilities of the non-contact CWL method for thickness measurements of thin soft organic films. It was found that the CWL technique is proper for a measurement of thin soft organic films with higher than 40-50 nm film thicknesses. As a complementary feature of the method 2D and 3D surface morphology imaging of the films were recorded and processed by digital calculations and Fourier filtering.",
  booktitle="Jubilee Scientific Session "Interdisciplinaty Chemistry"",
  chapter="102465",
  year="2013",
  month="october",
  pages="48--48",
  type="abstract"
}