Detail publikace

Automatized Schottky Cathode Fabrication and Noise Analysis

KNÁPEK, A.

Originální název

Automatized Schottky Cathode Fabrication and Noise Analysis

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

The paper introduces a method for fabrication and diagnostics of microscopic cathode based on Schottky field emission. Schottky emission is the predominant electron source technology in actual focused electron beam equipment, including scanning electron microscopy (SEM), transmission electron microscopy (TEM), Auger systems, and semiconductor inspection tools. Achieving proper results requires an electron source with the following ideal properties: small source size, low electron emission energy spread, high brightness (beam current per solid angle), low noise and long-term stability, simple and low-cost operation. Electrochemical etching procedure, used for producing extra-sharp tungsten cathode tips, together with suitable noise based analysis method are presented in the paper.

Klíčová slova

Schottky Emission, Schottky Cathodes, Electrochemical Etching

Autoři

KNÁPEK, A.

Rok RIV

2009

Vydáno

31. 8. 2009

ISBN

978-80-214-3938-2

Kniha

Sborník příspěvků konfernece KRÁLÍKY 2009

Číslo edice

1

Strany od

141

Strany do

144

Strany počet

4

BibTex

@inproceedings{BUT29266,
  author="Alexandr {Knápek}",
  title="Automatized Schottky Cathode Fabrication and Noise Analysis",
  booktitle="Sborník příspěvků konfernece KRÁLÍKY 2009",
  year="2009",
  number="1",
  pages="141--144",
  isbn="978-80-214-3938-2"
}