Publication detail

Automatized Schottky Cathode Fabrication and Noise Analysis

KNÁPEK, A.

Original Title

Automatized Schottky Cathode Fabrication and Noise Analysis

English Title

Automatized Schottky Cathode Fabrication and Noise Analysis

Type

conference paper

Language

en

Original Abstract

The paper introduces a method for fabrication and diagnostics of microscopic cathode based on Schottky field emission. Schottky emission is the predominant electron source technology in actual focused electron beam equipment, including scanning electron microscopy (SEM), transmission electron microscopy (TEM), Auger systems, and semiconductor inspection tools. Achieving proper results requires an electron source with the following ideal properties: small source size, low electron emission energy spread, high brightness (beam current per solid angle), low noise and long-term stability, simple and low-cost operation. Electrochemical etching procedure, used for producing extra-sharp tungsten cathode tips, together with suitable noise based analysis method are presented in the paper.

English abstract

The paper introduces a method for fabrication and diagnostics of microscopic cathode based on Schottky field emission. Schottky emission is the predominant electron source technology in actual focused electron beam equipment, including scanning electron microscopy (SEM), transmission electron microscopy (TEM), Auger systems, and semiconductor inspection tools. Achieving proper results requires an electron source with the following ideal properties: small source size, low electron emission energy spread, high brightness (beam current per solid angle), low noise and long-term stability, simple and low-cost operation. Electrochemical etching procedure, used for producing extra-sharp tungsten cathode tips, together with suitable noise based analysis method are presented in the paper.

Keywords

Schottky Emission, Schottky Cathodes, Electrochemical Etching

RIV year

2009

Released

31.08.2009

ISBN

978-80-214-3938-2

Book

Sborník příspěvků konfernece KRÁLÍKY 2009

Edition number

1

Pages from

141

Pages to

144

Pages count

4

BibTex


@inproceedings{BUT29266,
  author="Alexandr {Knápek}",
  title="Automatized Schottky Cathode Fabrication and Noise Analysis",
  annote="The paper introduces a method for fabrication and diagnostics of microscopic cathode based on Schottky field emission. Schottky emission is the predominant electron source technology in actual focused electron beam equipment, including scanning electron microscopy (SEM), transmission electron microscopy (TEM), Auger systems, and semiconductor inspection tools. Achieving proper results requires an electron source with the following ideal properties: small source size, low electron emission energy spread, high brightness (beam current per solid angle), low noise and long-term stability, simple and low-cost operation. Electrochemical etching procedure, used for producing extra-sharp tungsten cathode tips, together with suitable noise based analysis method are presented in the paper.",
  booktitle="Sborník příspěvků konfernece KRÁLÍKY 2009",
  chapter="29266",
  howpublished="print",
  year="2009",
  month="august",
  pages="141--144",
  type="conference paper"
}