Detail publikace

Micro-Electro-Mechanical Systems (MEMS)

Originální název

Micro-Electro-Mechanical Systems (MEMS)

Anglický název

Micro-Electro-Mechanical Systems (MEMS)

Jazyk

en

Originální abstrakt

In this article the new pressure sensors using carbon nanotubes (CNTs) arrays as the electron source in emission sensor or as the surface increase element in capacitance sensor are presented. Both sensors are made of the two parts; elastic electrodesensing film fabricated by anisotropic etching and solid electrode. The emission sensor has elastic anode electrode with membrane and carbon nanotubes (MWCNTs) arrays cathode in the chamber. The capacitance sensor has the same topology extensive by CNT on both electrodes. The MWCNTs were grown by plasma enhanced chemical vapour deposition (PECVD) in plasma reactor.

Anglický abstrakt

In this article the new pressure sensors using carbon nanotubes (CNTs) arrays as the electron source in emission sensor or as the surface increase element in capacitance sensor are presented. Both sensors are made of the two parts; elastic electrodesensing film fabricated by anisotropic etching and solid electrode. The emission sensor has elastic anode electrode with membrane and carbon nanotubes (MWCNTs) arrays cathode in the chamber. The capacitance sensor has the same topology extensive by CNT on both electrodes. The MWCNTs were grown by plasma enhanced chemical vapour deposition (PECVD) in plasma reactor.

BibTex


@inproceedings{BUT28141,
  author="Richard {Ficek} and Radimír {Vrba}",
  title="Micro-Electro-Mechanical Systems (MEMS)",
  annote="In this article the new pressure sensors using carbon nanotubes (CNTs) arrays as the
electron source in emission sensor or as the surface increase element in capacitance
sensor are presented. Both sensors are made of the two parts; elastic electrodesensing
film fabricated by anisotropic etching and solid electrode. The emission
sensor has elastic anode electrode with membrane and carbon nanotubes
(MWCNTs) arrays cathode in the chamber. The capacitance sensor has the same
topology extensive by CNT on both electrodes. The MWCNTs were grown by
plasma enhanced chemical vapour deposition (PECVD) in plasma reactor.",
  address="Ing. Zdeněk Novotný, CSc., Brno, Ondráčkova 105",
  booktitle="Moderní metody řešení, návrhu a aplikace elektronických obvodů",
  chapter="28141",
  institution="Ing. Zdeněk Novotný, CSc., Brno, Ondráčkova 105",
  year="2007",
  month="september",
  pages="48--51",
  publisher="Ing. Zdeněk Novotný, CSc., Brno, Ondráčkova 105",
  type="conference paper"
}