Publication detail

Micro-Electro-Mechanical Systems (MEMS)

FICEK, R. VRBA, R.

Original Title

Micro-Electro-Mechanical Systems (MEMS)

English Title

Micro-Electro-Mechanical Systems (MEMS)

Type

conference paper

Language

en

Original Abstract

In this article the new pressure sensors using carbon nanotubes (CNTs) arrays as the electron source in emission sensor or as the surface increase element in capacitance sensor are presented. Both sensors are made of the two parts; elastic electrodesensing film fabricated by anisotropic etching and solid electrode. The emission sensor has elastic anode electrode with membrane and carbon nanotubes (MWCNTs) arrays cathode in the chamber. The capacitance sensor has the same topology extensive by CNT on both electrodes. The MWCNTs were grown by plasma enhanced chemical vapour deposition (PECVD) in plasma reactor.

English abstract

In this article the new pressure sensors using carbon nanotubes (CNTs) arrays as the electron source in emission sensor or as the surface increase element in capacitance sensor are presented. Both sensors are made of the two parts; elastic electrodesensing film fabricated by anisotropic etching and solid electrode. The emission sensor has elastic anode electrode with membrane and carbon nanotubes (MWCNTs) arrays cathode in the chamber. The capacitance sensor has the same topology extensive by CNT on both electrodes. The MWCNTs were grown by plasma enhanced chemical vapour deposition (PECVD) in plasma reactor.

Keywords

carbon nanotubes, emission, pressure sensor

Released

04.09.2007

Publisher

Ing. Zdeněk Novotný, CSc., Brno, Ondráčkova 105

Location

Brno

ISBN

978-80-214-3535-3

Book

Moderní metody řešení, návrhu a aplikace elektronických obvodů

Edition number

první

Pages from

48

Pages to

51

Pages count

4

BibTex


@inproceedings{BUT28141,
  author="Richard {Ficek} and Radimír {Vrba}",
  title="Micro-Electro-Mechanical Systems (MEMS)",
  annote="In this article the new pressure sensors using carbon nanotubes (CNTs) arrays as the
electron source in emission sensor or as the surface increase element in capacitance
sensor are presented. Both sensors are made of the two parts; elastic electrodesensing
film fabricated by anisotropic etching and solid electrode. The emission
sensor has elastic anode electrode with membrane and carbon nanotubes
(MWCNTs) arrays cathode in the chamber. The capacitance sensor has the same
topology extensive by CNT on both electrodes. The MWCNTs were grown by
plasma enhanced chemical vapour deposition (PECVD) in plasma reactor.",
  address="Ing. Zdeněk Novotný, CSc., Brno, Ondráčkova 105",
  booktitle="Moderní metody řešení, návrhu a aplikace elektronických obvodů",
  chapter="28141",
  institution="Ing. Zdeněk Novotný, CSc., Brno, Ondráčkova 105",
  year="2007",
  month="september",
  pages="48--51",
  publisher="Ing. Zdeněk Novotný, CSc., Brno, Ondráčkova 105",
  type="conference paper"
}