Course detail

Assessment of Surface Quality by Optical Methods

FSI-9KPOAcad. year: 2023/2024

The use of the interaction between electromagnetic radiation and solid surfaces for the evaluation of their quality

Optical profilometry

The use of the electromagnetic radiation scattering from the surfaces mentioned.

The determination of optical parameters of thin films.

 

 

 

Language of instruction

Czech

Number of ECTS credits

0

Mode of study

Not applicable.

Guarantor

prof. RNDr. Miloslav Ohlídal, CSc.

Department

Institute of Physical Engineering (ÚFI)

Entry knowledge

As part of the introduction to the study of the subject, students will be introduced to the following concepts with the extent necessary to master the subject.

  • The description of a random rough surface (Random functions, Spectral power density of a random function, Continuous and Discrete Fourier transform).
  • Principles of the theory of diffraction, which is the starting point for the aforementioned theories of electromagnetic irradiation.
  • Basics of thin film optics with an emphasis on films with defects.



Rules for evaluation and completion of the course

The partial examination of doctoral studies.

Oral exam, arbitrary literature is allowed.


Aims

Due to a request from the optical industry, the topic was narrowed to surfaces generated for industrial optical applications. The quality of these surfaces is determined primarily by their shape, roughness, and coating with appropriate thin films. Therefore, students will become familiar with the basis of optical profilometry, the use of the electromagnetic radiation scattering from the surfaces mentioned, and the determination of optical parameters of thin films.


Students will become familiar with

  1. Principles of operation of the most used optical profilometers and limitations of their usage in the given task. They will test their knowledge by means of measurements using the optical profilometer MicroProf FRT within non-standard tasks (e.g., the measurement of residual internal stress within thin films).
  2. The use of Beckmann-Kirchhoff theory and Rayleigh-Rice theory for the roughness of determination of the given solid surfaces. They will test their knowledge by means of measurements using the SMIII scatterometer built in our laboratory.
  3. The non-standard technique of imaging spectroscopic reflectometry, which is intended for optical characterization non-uniform thin films. They will test their knowledge by means of measurements using the imaging spectroscopic reflectometers built in our laboratory.

 

Study aids

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

Beckmann, P., Spizzichino, A: The Scattering of Electromagnetic Waves from Rough Surfaces. Pergamon Press, Oxford, 1963. (EN)
Ogilvy, J. A.: Theory of Wave Scattering form Random Rough Surfaces. IOP Publishing Ltd.,Bristol 1991. (EN)
STOVER, John C. Optical scattering: measurement and analysis. 3rd ed. Bellingham, Wash.: SPIE Press, c2012, xxiv, 307 p. ISBN 978-081-9492-517. (EN)
Mainsah, E., Greenwood, J. A. and Chetwynd, D. G.: Metrology and Properties of Engineering Surfaces. Kluwer Academic Publishers, Boston 2001 (EN)
Optical characterization of thin solid films. (Eds.: Olaf Stenzel, Miloslav Ohlídal) New York, NY: Springer Berlin Heidelberg, 2018. ISBN 978-3-319-75324-9. (EN)
BORN, Max a Emil WOLF. Principles of Optics. 7th (expanded) edition. Cambridge: University Press, 2005. ISBN 0521642221. (EN)
GOODMAN, Joseph W. Introduction to Fourier Optics. San Francisco: McGraw-Hill Book Company, 1968. (EN)
BRACEWELL, Ronald N. The Fourier transform and its applications. 3rd ed. Boston: McGraw Hill, c2000. ISBN 00-730-3938-1. (EN)
BRIGHAM, E. Oran. The fast Fourier transform and its applications. Englewood Cliffs, N.J.: Prentice Hall, c1988. ISBN 0-13-307505-2. (EN)

JAN, Jiří. Číslicová filtrace, analýza a restaurace signálů. 2. upr. a rozš. vyd. Brno: VUTIUM, 2002. ISBN 80-214-2911-9.

(CS)

GOODMAN, Joseph W. Statistical optics. Wiley classics library ed. New York: Wiley, 2000, 550 p. ISBN 04-710-1502-4.

(EN)

YEH, Pochi. Optical waves in layered media. Hoboken: Wiley-Interscience, c2005. Series in pure and applied optics (Wiley). ISBN isbn0-471-73192-7.

(EN)

Recommended reading

Born, M., Wolf, E.: Principles of Optics. 7th (expanded) ed.,. Cambridge University Press, Cambridge 1999
Goodman, J. W.: Introduction to Fourier Optics. 2nd ed.,. McGraw-Hill, New York 1996.
Bumbálek B., Odvody V., Ošťádal B.: Drsnost povrchu,. SNTL, Praha 1989.

Classification of course in study plans

  • Programme D-FIN-P Doctoral, 1. year of study, summer semester, recommended

Type of course unit

 

Lecture

20 hours, optionally

Teacher / Lecturer

prof. RNDr. Miloslav Ohlídal, CSc.

Syllabus

  1. Character of the rough surface and its description
  2. Classical optical methods of surface quality measurement (brief overview)
  3. Modern optical methods of surface quality measurement (brief overview)
  4. Optical profilometry for surfaces generated for industrial optical applications.
  5. Formulation of the Beckman-Kirchhoff theory of scattering of electromagnetic waves from surfaces generated for optical applications.
  6. Formulation of the Rayleigh-Rice theory of scattering of electromagnetic waves from generated surfaces for optical applications.
  7. Fundamentals of thin film optics with an emphasis on thin films with defects
  8. Contribution of the Coherence Optics Laboratory of the IFE FME BUT to the issue of the subject