Course detail

Plasma and Dry Nano/Microtechnologies

CEITEC VUT-DS110AAcad. year: 2019/2020

Not applicable.

Language of instruction

Czech

Learning outcomes of the course unit

Not applicable.

Prerequisites

Not applicable.

Co-requisites

Not applicable.

Planned learning activities and teaching methods

Not applicable.

Assesment methods and criteria linked to learning outcomes

Not applicable.

Course curriculum

Not applicable.

Work placements

Not applicable.

Aims

Not applicable.

Specification of controlled education, way of implementation and compensation for absences

Not applicable.

Recommended optional programme components

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

Lecture Notes on Principles of Plasma Processing, F. F. Chen, J. P. Chang, Plenum 2002
Principles of Plasma Discharges and Material Processing, M. A. Lieberman, A. J. Lichtenberg, Wiley 1994
Handbook of Plasma Immersion Ion Implantation and Deposition, Ed. A. Anders, Wiley 2000
Handbook of Nanotechnology, Ed. B. Bhushan, Springer 2010

Recommended reading

Not applicable.