Course detail

Microtechnologies

CEITEC VUT-DS107AAcad. year: 2019/2020

Not applicable.

Learning outcomes of the course unit

Not applicable.

Prerequisites

Not applicable.

Co-requisites

Not applicable.

Recommended optional programme components

Not applicable.

Recommended or required reading

Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1,2, Edited by P. Rai-Choudhury. Society of Photo-Optical Instrumentation Engineers, 1997
Marc J. Madou, Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set. CRC Press, 2011
Tai-Ran Hsu, MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering. Wiley, 2008

Planned learning activities and teaching methods

Not applicable.

Assesment methods and criteria linked to learning outcomes

Not applicable.

Language of instruction

English

Work placements

Not applicable.

Aims

Not applicable.

Classification of course in study plans

  • Programme STIPMNK Doctoral

    branch PM , 1. year of study, winter semester, 0 credits, compulsory-optional

  • Programme STIPMN Doctoral

    branch PM , 1. year of study, winter semester, 0 credits, compulsory-optional

  • Programme STIAMN Doctoral

    branch AM , 1. year of study, winter semester, 0 credits, compulsory-optional

  • Programme STIAMNC Doctoral

    branch AM , 1. year of study, winter semester, 0 credits, compulsory-optional

  • Programme STIPMN Doctoral

    branch PNTMT , 1. year of study, winter semester, 0 credits, compulsory-optional

  • Programme STIPMN Doctoral

    branch PNTMT , 1. year of study, winter semester, 0 credits, compulsory-optional

  • Programme STIAMNC Doctoral

    branch ANTMT , 1. year of study, winter semester, 0 credits, compulsory-optional

  • Programme STIAMN Doctoral

    branch ANTMT , 1. year of study, winter semester, 0 credits, compulsory-optional

  • Programme STIPMNK Doctoral

    branch PM , 2. year of study, winter semester, 0 credits, compulsory-optional

  • Programme STIPMN Doctoral

    branch PM , 2. year of study, winter semester, 0 credits, compulsory-optional

  • Programme STIPMN Doctoral

    branch PNTMT , 2. year of study, winter semester, 0 credits, compulsory-optional

  • Programme STIPMN Doctoral

    branch PNTMT , 2. year of study, winter semester, 0 credits, compulsory-optional

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