Course detail

Microtechnologies

CEITEC VUT-DS107Acad. year: 2019/2020

Not applicable.

Learning outcomes of the course unit

Not applicable.

Prerequisites

Not applicable.

Co-requisites

Not applicable.

Recommended optional programme components

Not applicable.

Recommended or required reading

Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1,2, Edited by P. Rai-Choudhury. Society of Photo-Optical Instrumentation Engineers, 1997 (EN)
Marc J. Madou, Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set. CRC Press, 2011 (EN)
Tai-Ran Hsu, MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering. Wiley, 2008 (EN)

Planned learning activities and teaching methods

Not applicable.

Assesment methods and criteria linked to learning outcomes

Not applicable.

Language of instruction

Czech

Work placements

Not applicable.

Aims

Not applicable.

Classification of course in study plans

  • Programme STIPMN Doctoral

    branch PM , 1. year of study, summer semester, 0 credits, compulsory-optional

  • Programme STIPMNK Doctoral

    branch PM , 1. year of study, summer semester, 0 credits, compulsory-optional

  • Programme STIAMN Doctoral

    branch AM , 1. year of study, summer semester, 0 credits, compulsory-optional

  • Programme STIPMN Doctoral

    branch PNTMT , 1. year of study, summer semester, 0 credits, compulsory-optional

  • Programme STIPMN Doctoral

    branch PNTMT , 1. year of study, summer semester, 0 credits, compulsory-optional

  • Programme STIAMN Doctoral

    branch ANTMT , 1. year of study, summer semester, 0 credits, compulsory-optional

  • Programme STIPMNK Doctoral

    branch PM , 2. year of study, summer semester, 0 credits, compulsory-optional

  • Programme STIPMN Doctoral

    branch PM , 2. year of study, summer semester, 0 credits, compulsory-optional

  • Programme STIPMN Doctoral

    branch PNTMT , 2. year of study, summer semester, 0 credits, compulsory-optional

  • Programme STIPMN Doctoral

    branch PNTMT , 2. year of study, summer semester, 0 credits, compulsory-optional

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