Course detail

Microtechnologies

CEITEC VUT-DS107Acad. year: 2019/2020

Not applicable.

Language of instruction

Czech

Number of ECTS credits

0

Mode of study

Not applicable.

Learning outcomes of the course unit

Not applicable.

Prerequisites

Not applicable.

Co-requisites

Not applicable.

Planned learning activities and teaching methods

Not applicable.

Assesment methods and criteria linked to learning outcomes

Not applicable.

Course curriculum

Not applicable.

Work placements

Not applicable.

Aims

Not applicable.

Specification of controlled education, way of implementation and compensation for absences

Not applicable.

Recommended optional programme components

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1,2, Edited by P. Rai-Choudhury. Society of Photo-Optical Instrumentation Engineers, 1997 (EN)
Marc J. Madou, Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set. CRC Press, 2011 (EN)
Tai-Ran Hsu, MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering. Wiley, 2008 (EN)

Recommended reading

Not applicable.

Classification of course in study plans

  • Programme STIPMNK Doctoral

    branch PM , 1. year of study, summer semester, compulsory-optional

  • Programme STIPMN Doctoral

    branch PM , 1. year of study, summer semester, compulsory-optional

  • Programme STIAMNC Doctoral

    branch AM , 1. year of study, summer semester, compulsory-optional

  • Programme STIAMN Doctoral

    branch AM , 1. year of study, summer semester, compulsory-optional

  • Programme STIPMN Doctoral

    branch PNTMT , 1. year of study, summer semester, compulsory-optional

  • Programme STIPMN Doctoral

    branch PNTMT , 1. year of study, summer semester, compulsory-optional

  • Programme STIAMN Doctoral

    branch ANTMT , 1. year of study, summer semester, compulsory-optional

  • Programme STIAMNC Doctoral

    branch ANTMT , 1. year of study, summer semester, compulsory-optional

  • Programme STIPMNK Doctoral

    branch PM , 2. year of study, summer semester, compulsory-optional

  • Programme STIPMN Doctoral

    branch PM , 2. year of study, summer semester, compulsory-optional

  • Programme STIPMN Doctoral

    branch PNTMT , 2. year of study, summer semester, compulsory-optional

  • Programme STIPMN Doctoral

    branch PNTMT , 2. year of study, summer semester, compulsory-optional