Electronic Components Production
FEKT-MPC-VSKAcad. year: 2020/2021
The course deals with basic physical principles of semiconductors, including their production. The course provides an overview of semiconductor chip development, production of individual types of components and their connection. The course is focused mainly on various types of diodes and transistors, the problems of their production with explanation of individual manufacturing operations (Oxidation, epitaxy, photolithography, diffusion, implantation) and phenomena that may occur in components (Stress migration, electromigration). The individual manufacturing operations are explained and demonstrated in the laboratory in an illustrative way so that the student gains basic knowledge about the structure of semiconductor devices and their function. Lessons are supervised by expert from practice (firm ON Semiconductor Czech Republic, s.r.o.). The subject offers a good overview about technological processes that are used for semiconductor technologies.
Learning outcomes of the course unit
Student after completing the course:
1. knows division and the basic principles of semiconductor devices realization,
2. understands and knows the fundamentals of semiconductor devices and describes their use,
3. will explain the implementation steps in the process of manufacturing basic semiconductor devices for experimental activities in the laboratory,
4. takes an opinion on the possibility of employment in manufacturing, service and design institutions in the field of semiconductor components.
The subject knowledge on the Bachelor´s degree level is requested.
Recommended optional programme components
Recommended or required reading
Musil, V., Technologické procesy a jejich modelování, učební text, VUT v Brně, 1990 (CS)
SZENDIUCH, I. a kol. Technologie elektronických obvodů a systémů. GA102/00/ 0969. GA102/00/ 0969. Brno: Nakladatelství VUTIUM, Brno, 2002. 289 s. ISBN: 80-214-2072- 3. (CS)
I. Szendiuch, V. Musil, J. Stehlík. Výroba součástek a konstrukčních prvků. Elektronický studijní text. 2006. 84 str., VUT FEKT Brno. Brno: VUT Brno, 2006. s. 1 ( s.) (CS)
STRAKOŠ, V.: Výroba součástek a konstrukčních prvků. Prezentace projektu KISP, VUT v Brně, 2015 (CS) (CS)
MUSIL, V. a kol.: Výroba součástek a konstrukčních prvků. Nanotechnologie. Prezentace projektu KISP. VUT v Brně, 2015 (CS)
POOLE,C.P.(JR). -OWENS, F.J.: Introduction to Nanotechnology, Wiley Interscience, 2003 ISBN:0-471-07935-9 (EN)
DIVENTRA M., EVOY S., HEFLIN J. R.: Introduction to Nanoscale Science and Technology. Kluwer Academic Publishers, Boston 2004 (EN)
YING J. Y.: Nanostructured Materials. Academic Press, San Diego 2001 STREETMAN, B.G. –BANERJEE, S.K.: Solid state electronic devices. Prentice Hall, 2010, ISBN 978-0-13-245479-7 (EN)
Planned learning activities and teaching methods
Teaching methods depend on the type of course unit as specified in the article 7 of BUT Rules for Studies and Examinations. There are lessons, labs and excersizes included and also profesional text introduction. There is also e-learning (Moodle) included. Studend output is one own project.
Assesment methods and criteria linked to learning outcomes
The conditions for completion of a course are specified by a regulation issued by the lecturer responsible for the course and updated for every academic year.
Language of instruction
1. Selected physical principles
3. Metal–semiconductor junction, Schottky diode
4. Bipolar transistor
5. MIS Diode
6. Transistor JFET
7. Transistor MOSFET
8. Integrity of gate oxide
9. Hot carrier injection (HCI)
10. Stress migration and electromigration in metallization.
11. Plasma induced damage (PID)
12. Oxidation and epitaxy of silicon
14. Diffusion and implantation
The main aim of the course is to give students a basic knowledge about the basics of semiconductor technology. The aim of the course in the theoretical part is to acquaint students with basic physical properties of semiconductors, principles of semiconductor devices function, their curent conception and basics of their production. In the practical part of the course, the aim is to acquire basic knowledge and skills for working with semiconductors in a clean laboratory so that students will be able to to join research, development and production subjects, and also to continue in the scientific activities.
Specification of controlled education, way of implementation and compensation for absences
The content and forms of instruction in the evaluated course are specified by a regulation issued by the lecturer responsible for the course and updated for every academic year.
Theoretical exercise - calculations of oxidation times, diffusion and depth of semiconductor transition.
Laboratory exercise and project - design and description of production of student semiconductor chip performed in the laboratory (cleaning, photolithography, metallization, etc.).
Classification of course in study plans
- Programme MPC-MEL Master's, 2. year of study, winter semester, 6 credits, compulsory