Principles of Equipment for Physical Technologies
FSI-TPZ-AAcad. year: 2017/2018
The course gives summary of high technologies for deposition of thin films and multilayers, coatings, etching of surfaces, alloying, annealing of materials and fabrication of nanostructures. Course primarily gives an explanation of physical principles of these processes and describes physical background of the corresponding experimental tools.
Learning outcomes of the course unit
The course will help a student to get basic knowledge on modern vacuum technologies and, hence, to choose a diploma and/or PhD project.
Atomic Physics, Solid State Physics, Quantum Physics, Statistical Physics and Thermodynamics, Vacuum Physics and Technology.
Recommended optional programme components
Recommended or required reading
ECKERTOVÁ, L.: Fyzika tenkých vrstev
BRODIE, I. - MURAY, J. J.: The Physics of Micro/Nano-Fabrication
CHEN, F. F.: Úvod do fyziky plazmatu
ECKERTOVÁ, L.: Elektronika povrchů
RIVIERE, J. C.: Surface Analytical Techniques
VÁLYI, L.: Atom and Ion Sources
L. ECKERTOVÁ: Fyzikální elektronika pevných látek, Karolinum, Praha 1992 (CS)
J. C. RIVIERE: Surface Analytical Techniques, Clarendon Press, Oxford 1990 (EN)
D. HALLIDAY, R. RESNICK, J. WALKER: Fyzika. (2. přepracované vydání.) VUTIUM, Brno 2013 (CS)
Planned learning activities and teaching methods
The course is taught through lectures explaining the basic principles and theory of the discipline. Exercises are focused on practical topics presented in lectures.
Assesment methods and criteria linked to learning outcomes
The class ticket (credit) is obtained according to the performance and quality of work at practice lessons (individually calculated examples and a project). At the examination the performance of students at practising will be taken into account, consultation of teaching materials, textbooks and notes during writing a test is allowed. At the oral part of the exam discussions on physical principles of vacuum technologies and relevant experimental facilities will be carried out.
Language of instruction
To provide students basic knowledge on modern methods of thin film/multilayer fabrication and other state-of-the-art technologies (e.g. nanostructure fabrication).
Specification of controlled education, way of implementation and compensation for absences
The presence of students at practice is obligatory and is monitored by a tutor. The way how to compensate missed practice lessons will be decided by a tutor.
Type of course unit
26 hours, optionally
Teacher / Lecturer
Introduction to physical technologies.
Summary and characterization of selected physical technologies and analytical methods.
Application of physical technologies: from surfaces to nanotechnologies.
Principles and tools of physical technologies.
Electron sources (Electron emission, Extraction and forming of electron beams, Particle optical aberrations, Design of electron beam sources).
Ion beam sources (Ion preparation methods, Electron impact ion beam sources, Plasma, Ion extraction from plasma, Extraction ad forming of ion beams, Ion beam parameters, Plasma ion beam sources).
Atomic and molecular beam sources (Atomic source overview, Gas effusion, Angular distribution of particle flux from the slit, Emissive diagram of neutral beam particle sources, Collimator, Thermal atomic beam sources).
Fundamentals of particle optics (Analogy between particle and geometrical optics, Laplace equation, Paraxial equation of trajectory, Role of lenses in particle optics, Analytical methods in particle optics, Particles in magnetic fields, Scheme of the simple particle optic system, Distribution of the potential on the axis, Computer simulation of ion and electron beams, Space charge).
Interaction of particles with solids (Interaction of electrons and ions with surfaces, Scattering, Sputtering, Channelling, Interaction spectra)
Physical technologies (Deposition of thin films and coatings: CVD, PECVD, PVD, magnetron sputtering, ion beam sputtering, direct ion beam deposition, plasma and ion beam etching, lithography, implantation, epitaxy: MBE, MOMBE).
New trends in physical technologies.
6 hours, compulsory
Teacher / Lecturer
In addition to calculation of supportive theoretical examples (taking place during the whole semester), the students work on individual projects (computer code SIMION).
7 hours, compulsory
Teacher / Lecturer
At practicing in a computational lab the students will learn to use a computer code SIMION for a design of optical systems of electron and ion beam facilities.
eLearning: currently opened course