Course detail

Vacuum technology

FEKT-LVAFAcad. year: 2011/2012

Gas, vapour, pressure, Kinetic theory of gases. Volume processes and transport of gas, gas diffusion and gas viscosity. The gas transport through the vacuum pipes. The surface processes, adsorption, desorption. The pumping processes, The basic principles of the gas transport. Transport and getter pumps. Pressure measurement. Thermocouple Gauges, Pirani Gauges. Ion Gauges. The basic principles of vacuum equipment design. Technological processes in low pressure gases.

Language of instruction

Czech

Number of ECTS credits

4

Mode of study

Not applicable.

Guarantor

prof. Ing. Jaroslav Boušek, CSc.

Department

Department of Microelectronics (UMEL)

Learning outcomes of the course unit

Basic skills and orientation in vacuum technology.

Prerequisites

The subject knowledge on the Bachelor´s degree level is requested.

Co-requisites

Not applicable.

Planned learning activities and teaching methods

Teaching methods depend on the type of course unit as specified in the article 7 of BUT Rules for Studies and Examinations.

Assesment methods and criteria linked to learning outcomes

Laboratory practicum - 30 points; minimum 20 points.
Final exam – 70 points; minimum 30 points.

Course curriculum

Gas, vapour, pressure, Measurement units and their relation.
Basic principles and laws for the ideal gases. Boyle-Mariott law, Gay-Lussac law. The state equation of the gas. Dalton law. Important constants.
Kinetic theory of gases - basic principles. Relation
between pressure, concentration and temperature of gas. The mean free path of gas molecules. The thermal velocity
of the gas molecules, Maxwel-Boltzmann statistic.
Volume processes and transport of gas, diffusion, viscosity of gas, thermal conductivity of gas.
The gas transport through the vacuum pipes. Gas conductance of Vacuum pipes. Ohms law in gas transport. The volume and mass flow of the gas. The different mechanism of the gas transport - turbulent, viscose, molecular, effusion.
The limit pressure of the vacuum equipment. Pumping speed of the vacuum pumps and its measurement, the exhaust time. The influence of leakage and desorption.
The surface processes, adsorption, desorption, monomolecular and multimolecular layers, basic adsorption isotherms, saturated vapour pressure.
The basic principles of the gas transport, Transport and getter pumps. The pumping processes
Mechanical pumps, Two Stage Mechanical pump, Roots blowers, Turbo pumps, Diffusion pumps. Oil mist eliminators,
Getter pumps, Ion pumps, Diode Ion pumps, Titanium sublimation pumps, diode and triode Ion pumps. Cryopumps. Sorption pumps, Molecular sieve .
Pressure measurement (absolute and relative), Torricelli tube, U- tube, Thermocouple Gauges, Pirani Gauges.
Ion Gauges, Cold Cathode Gauges , Alfatron , Penning Gauges. Design of the triode Ion Gauge. Alpert-Bayard and Helmer-Hayward tube design.
The basic principles of vacuum equipment design. Technological processes in low pressure gases.

Work placements

Not applicable.

Aims

Acquirement of the knowledges about modern vacuum technics for use in electronics, in electrotechnical and mechanical industry

Specification of controlled education, way of implementation and compensation for absences

Laboratory practicum. Numerical practicum.

Recommended optional programme components

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

Fikes L. :Fyzika nízkých tlaků ,SNTL, Praha 1991 (CS)
Pátý L. : Vakuová technika ,ČVUT, Praha 1990 (CS)
Grozskowski J. :Technika vysokého vakua ,SNTL, Praha 1981 (CS)

Recommended reading

Not applicable.

Classification of course in study plans

  • Programme EEKR-ML Master's

    branch ML-MEL , 1. year of study, winter semester, optional specialized
    branch ML-EVM , 2. year of study, winter semester, optional interdisciplinary

  • Programme EEKR-CZV lifelong learning

    branch ET-CZV , 1. year of study, winter semester, optional specialized

Type of course unit

 

Lecture

13 hours, optionally

Teacher / Lecturer

prof. Ing. Jaroslav Boušek, CSc.

Syllabus

Gas, vapour, pressure, Measurement units and their relation.
Basic principles and laws for the ideal gases. Boyle-Mariott law, Gay-Lussac law. The state equation of the gas. Dalton law. Important constants.
Kinetic theory of gases - basic principles. Relation
between pressure, concentration and temperature of gas. The mean free path of gas molecules. The thermal velocity
of the gas molecules, Maxwel-Boltzmann statistic.
Volume processes and transport of gas, diffusion, viscosity of gas, thermal conductivity of gas.
The gas transport through the vacuum pipes. Gas conductance of Vacuum pipes. Ohms law in gas transport. The volume and mass flow of the gas. The different mechanism of the gas transport - turbulent, viscose, molecular, effusion.
The limit pressure of the vacuum equipment. Pumping speed of the vacuum pumps and its measurement, the exhaust time. The influence of leakage and desorption.
The surface processes, adsorption, desorption, monomolecular and multimolecular layers, basic adsorption isotherms, saturated vapour pressure.
The basic principles of the gas transport, Transport and getter pumps. The pumping processes
Mechanical pumps, Two Stage Mechanical pump, Roots blowers, Turbo pumps, Diffusion pumps. Oil mist eliminators,
Getter pumps, Ion pumps, Diode Ion pumps, Titanium sublimation pumps, diode and triode Ion pumps. Cryopumps. Sorption pumps, Molecular sieve .
Pressure measurement (absolute and relative), Torricelli tube, U- tube, Thermocouple Gauges, Pirani Gauges.
Ion Gauges, Cold Cathode Gauges , Alfatron , Penning Gauges. Design of the triode Ion Gauge. Alpert-Bayard and Helmer-Hayward tube design.
The basic principles of vacuum equipment design. Technological processes in low pressure gases.

Fundamentals seminar

12 hours, compulsory

Teacher / Lecturer

prof. Ing. Jaroslav Boušek, CSc.

Syllabus

Gas, vapour, pressure, Measurement units and their relation. Laws for the ideal gases. Kinetic theory of gases. basic principles. Relation between pressure, concentration and temperature of gas.
The thermal velocity of the gas molecules, Maxwell-Boltzmann statistic. The mean free path of gas molecules. Volume processes and transport of gas, diffusion, viscosity of gas, thermal conductivity of gas.
The gas transport through the vacuum pipes. Gas conductance of Vacuum pipes. Ohms law in gas transport. The volume and mass flow of the gas. The different mechanism of the gas transport - turbulent, viscose, molecular, effusion.
The limit pressure of the vacuum equipment. Pumping speed of the vacuum pumps and its measurement, the exhaust time. The influence of leakage and desorption.
The surface processes, adsorption, desorption, monomolecular and multimolecular layers, basic adsorption isotherms, saturated vapour pressure.
The basic principles of vacuum equipment design.

Laboratory exercise

14 hours, compulsory

Teacher / Lecturer

prof. Ing. Jaroslav Boušek, CSc.

Syllabus

Introduction, basic skills and safety rules in vacuum lab.
The pumping equipments in lab - get more familiar.
Pumping speed measurement.
Thermocouple measurements and seting.
Gas conductance of the vacuum pipes measurement.
Gas flow measurement and seting.
Vacuum leak detection