Publication detail

The Aperture with Laval Nozzle in Secondary Electron Detector for Environmental Scanning Electron Microscopy

VYROUBAL, P. MAXA, J.

Original Title

The Aperture with Laval Nozzle in Secondary Electron Detector for Environmental Scanning Electron Microscopy

English Title

The Aperture with Laval Nozzle in Secondary Electron Detector for Environmental Scanning Electron Microscopy

Type

book chapter

Language

en

Original Abstract

Electron microscopes belong between the most versatile devices. They are used not only for material research as well as to providing comprehensive information on the microstructure, crystallography, chemical composition and other properties of the sample. The evaluation of pressure on the secondary electrons trajectory is one of the important parameter by design of scintillation detector of secondary electrons. The final process is influenced by the size and the shape of the apertures used to separate areas with different pressure gradient. The comparison of the aperture with circular hole and aperture with Laval nozzle is the aim of this article.

English abstract

Electron microscopes belong between the most versatile devices. They are used not only for material research as well as to providing comprehensive information on the microstructure, crystallography, chemical composition and other properties of the sample. The evaluation of pressure on the secondary electrons trajectory is one of the important parameter by design of scintillation detector of secondary electrons. The final process is influenced by the size and the shape of the apertures used to separate areas with different pressure gradient. The comparison of the aperture with circular hole and aperture with Laval nozzle is the aim of this article.

Keywords

Aperture, Laval nozzle, circular hole, Environmental scanning electron microscope, scintillation detector, trajectory of secondary electrons, Mach number, pressure.

RIV year

2013

Released

01.02.2013

Publisher

Silhavy sro (Scientfic Press)

Location

Vsetín 2012

ISBN

978-80-904741-2-3

Book

Computer Software and Hardware Applications

Edition

1

Edition number

1

Pages from

87

Pages to

95

Pages count

9

BibTex


@inbook{BUT97695,
  author="Petr {Vyroubal} and Jiří {Maxa}",
  title="The Aperture with Laval Nozzle in Secondary Electron Detector for Environmental Scanning Electron Microscopy",
  annote="Electron microscopes belong between the most versatile devices. They are used not only for material research as well as to providing comprehensive information on the microstructure, crystallography, chemical composition and other properties of the sample.
The evaluation of pressure on the secondary electrons trajectory is one of the important parameter by design of scintillation detector of secondary electrons. The final process is influenced by the size and the shape of the apertures used to separate areas with different pressure gradient.
The comparison of the aperture with circular hole and aperture with Laval nozzle is the aim of this article.",
  address="Silhavy sro (Scientfic Press)",
  booktitle="Computer Software and Hardware Applications",
  chapter="97695",
  edition="1",
  howpublished="print",
  institution="Silhavy sro (Scientfic Press)",
  year="2013",
  month="february",
  pages="87--95",
  publisher="Silhavy sro (Scientfic Press)",
  type="book chapter"
}