Publication detail

Analysis of the Impact of Supersonic Flow in Detector of Secondary Electrons ESEM

VYROUBAL, P. MAXA, J.

Original Title

Analysis of the Impact of Supersonic Flow in Detector of Secondary Electrons ESEM

English Title

Analysis of the Impact of Supersonic Flow in Detector of Secondary Electrons ESEM

Type

conference paper

Language

en

Original Abstract

Environmental scanning electron microscopy (ESEM) is one of the latest trends in microscopic methods. This type of microscope can works in two modes. In the vacuum mode, it acts as conventional scanning electron microscope (SEM). In the environmental mode, the microscope works at higher pressures in the specimen chamber, which has its advantages. We can observe samples electrically non-conductive and even wet samples without the risk of damage by drying. Scintillation and ionization detectors are used to detect secondary electrons. The ionization detector works on the principle of impact ionization. The scintillation detector contains a scintillator (e.g. YAG, CRY 18, etc.), which releases electrons when they hit a flash of light whose intensity is proportional to the energy of incident electrons. This article deals with analysis of the scintillation detector using CAD, CAE and ANSYS systems and applications with Laval nozzle aperture.

English abstract

Environmental scanning electron microscopy (ESEM) is one of the latest trends in microscopic methods. This type of microscope can works in two modes. In the vacuum mode, it acts as conventional scanning electron microscope (SEM). In the environmental mode, the microscope works at higher pressures in the specimen chamber, which has its advantages. We can observe samples electrically non-conductive and even wet samples without the risk of damage by drying. Scintillation and ionization detectors are used to detect secondary electrons. The ionization detector works on the principle of impact ionization. The scintillation detector contains a scintillator (e.g. YAG, CRY 18, etc.), which releases electrons when they hit a flash of light whose intensity is proportional to the energy of incident electrons. This article deals with analysis of the scintillation detector using CAD, CAE and ANSYS systems and applications with Laval nozzle aperture.

Keywords

Aperture, circular hole, Environmental scanning electron microscope, Laval nozzle, scintillation detector, trajectory of secondary electrons.

RIV year

2012

Released

30.05.2012

Publisher

Silhavy sro.

Location

Vsetín

ISBN

978-80-904741-1-6

Book

2nd Computer Science On-Line Conference in 2012

Edition

1

Edition number

1

Pages from

149

Pages to

155

Pages count

7

BibTex


@inproceedings{BUT92269,
  author="Petr {Vyroubal} and Jiří {Maxa}",
  title="Analysis of the Impact of Supersonic Flow in Detector of Secondary Electrons ESEM",
  annote="Environmental scanning electron microscopy (ESEM) is one of the latest trends in microscopic methods. This type of microscope can works in two modes. In the vacuum mode, it acts as conventional scanning electron microscope (SEM). In the environmental mode, the microscope works at higher pressures in the specimen chamber, which has its advantages. We can observe samples electrically non-conductive and even wet samples without the risk of damage by drying. Scintillation and ionization detectors are used to detect secondary electrons. The ionization detector works on the principle of impact ionization. The scintillation detector contains a scintillator (e.g. YAG, CRY 18, etc.), which releases electrons when they hit a flash of light whose intensity is proportional to the energy of incident electrons. 
This article deals with analysis of the scintillation detector using CAD, CAE and ANSYS systems and applications with Laval nozzle aperture.",
  address="Silhavy sro.",
  booktitle="2nd Computer Science On-Line Conference in 2012",
  chapter="92269",
  edition="1",
  howpublished="online",
  institution="Silhavy sro.",
  year="2012",
  month="may",
  pages="149--155",
  publisher="Silhavy sro.",
  type="conference paper"
}