Publication detail

Near-field photocurrent spectroscopy: superresolving method for inspection of semiconductor interfaces

LÉTAL, P., TOMÁNEK, P., GRMELA, L.

Original Title

Near-field photocurrent spectroscopy: superresolving method for inspection of semiconductor interfaces

Czech Title

Spektroskopie fotoproudu v blízkém poli: metoda pro zkoumání polovodičových rozhraní se superrozlišením

English Title

Near-field photocurrent spectroscopy: superresolving method for inspection of semiconductor interfaces

Type

conference paper

Language

en

Original Abstract

Near-field optical spectroscopy is an excellent tool to the nondesctructive inspection of the semiconductor interfaces. Its supperresolution is much better than that of the classical optical microscope.

Czech abstract

Optická spektroskopie v blízkém poli je skvělým nástrojem k nedestruktivnímu zkoumání polovodičových rozhraní. Její superrolišení dosahuje lepších hodnot než je rozlišení u klasického optického mikroskopu.

English abstract

Near-field optical spectroscopy is an excellent tool to the nondesctructive inspection of the semiconductor interfaces. Its supperresolution is much better than that of the classical optical microscope.

Keywords

near-field optics, local spectroscopy, semiconductor, interface

RIV year

2003

Released

19.10.2000

Location

Trnava

ISBN

80-227-1413-5

Book

8th CO-MAT-TECH 2000

Pages from

141

Pages to

146

Pages count

6

BibTex


@inproceedings{BUT7997,
  author="Petr {Létal} and Pavel {Tománek} and Lubomír {Grmela}",
  title="Near-field photocurrent spectroscopy: superresolving method for inspection of semiconductor interfaces",
  annote="Near-field optical spectroscopy is an excellent tool to the nondesctructive inspection of the semiconductor interfaces. Its supperresolution is much better than that of the classical optical microscope.",
  booktitle="8th CO-MAT-TECH 2000",
  chapter="7997",
  year="2000",
  month="october",
  pages="141",
  type="conference paper"
}