Publication detail

Formations of Al2O3/AlN structures by magnetron sputtering

SAFARALIEV, G. BILALOV, B. MAGAMEDOVA, E. SOBOLA, D. GITIKCHIEV, M.

Original Title

Formations of Al2O3/AlN structures by magnetron sputtering

English Title

Formations of Al2O3/AlN structures by magnetron sputtering

Type

journal article - other

Language

Russian

Original Abstract

The purpose of the work is investigation of basis of low-temperetature synthesis of AlN nanolayers formation by ion-plasma methods.

English abstract

The purpose of the work is investigation of basis of low-temperetature synthesis of AlN nanolayers formation by ion-plasma methods.

Keywords

aluminum nitride, substrate, nanolayer, deposition

Key words in English

aluminum nitride, substrate, nanolayer, deposition

Authors

SAFARALIEV, G.; BILALOV, B.; MAGAMEDOVA, E.; SOBOLA, D.; GITIKCHIEV, M.

Released

30. 4. 2010

Publisher

PI FS 77-39604

Location

Krasnoyarsk

ISBN

2072-0831

Periodical

In the World of Scientific Discoveries

Year of study

2010

Number

4.5

State

Russian Federation

Pages from

23

Pages to

24

Pages count

2

URL

http://www.nkras.ru

BibTex

@article{BUT76515,
  author="Gadjimet {Safaraliev} and Bilal {Bilalov} and Egana {Magamedova} and Dinara {Sobola} and Magomed {Gitikchiev}",
  title="Formations of Al2O3/AlN structures by magnetron sputtering",
  journal="In the World of Scientific Discoveries",
  year="2010",
  volume="2010",
  number="4.5",
  pages="23--24",
  issn="2072-0831",
  url="http://www.nkras.ru"
}