Publication detail

Obtaining of nanocrystalline aluminum nitride layers on sapphire

SAFARALIEV, G. BILALOV, B. KARDASHOVA, G. SOBOLA, D. GITIKCHIEV, M.

Original Title

Obtaining of nanocrystalline aluminum nitride layers on sapphire

English Title

Obtaining of nanocrystalline aluminum nitride layers on sapphire

Type

conference paper

Language

Russian

Original Abstract

This study describes the possibility of AlN nanocrystalline layers formation on the sapphire. Mean hardness of Vickers is defined for AlN in the 20-1400 oC temperature range. It was equal 18 GPa.

English abstract

This study describes the possibility of AlN nanocrystalline layers formation on the sapphire. Mean hardness of Vickers is defined for AlN in the 20-1400 oC temperature range. It was equal 18 GPa.

Keywords

mean hardness, pressure, nitridization, sputtering

Key words in English

mean hardness, pressure, nitridization, sputtering

Authors

SAFARALIEV, G.; BILALOV, B.; KARDASHOVA, G.; SOBOLA, D.; GITIKCHIEV, M.

Released

26. 5. 2009

Publisher

SPb. Izdatelstvo Polytech. univer.

Location

St.-Petersburg

Pages from

237

Pages to

239

Pages count

3

BibTex

@inproceedings{BUT76501,
  author="Gadjimet {Safaraliev} and Bilal {Bilalov} and Gulnara {Kardashova} and Dinara {Sobola} and Magomed {Gitikchiev}",
  title="Obtaining of nanocrystalline aluminum nitride layers on sapphire",
  booktitle="9-th International conference {"}Films and coatings -2009{"}",
  year="2009",
  number="009",
  pages="237--239",
  publisher="SPb. Izdatelstvo Polytech. univer.",
  address="St.-Petersburg"
}