Publication detail

Fabrication and Noise Diagnostics of Schottky Nanotip Cathodes

KNÁPEK, A. GRMELA, L.

Original Title

Fabrication and Noise Diagnostics of Schottky Nanotip Cathodes

Czech Title

Výroba a šumová diagnostika Schottkyho katod s nanohrotem

English Title

Fabrication and Noise Diagnostics of Schottky Nanotip Cathodes

Type

conference proceedings

Language

en

Original Abstract

The paper introduces a method for fabrication and diagnostics of microscopic cathode based on Schottky field emission. Schottky emission is the predominant electron source technology in actual focused electron beam equipment, including scanning electron microscopy (SEM), transmission electron microscopy (TEM), Auger systems, and semiconductor inspection tools. Achieving proper results requires an electron source with the following ideal properties: small source size, low electron emission energy spread, high brightness (beam current per solid angle), low noise and long-term stability, simple and low-cost operation. Electrochemical etching procedure, used for producing extra-sharp tungsten cathode tips, together with suitable noise based analysis method are presented in the paper. Noise diagnostics has been performed on the cathode, under the ultra high vacuum conditions (UHV) in order to provide basic analysis of manufactured cathodes. The noise spectroscopy in time and frequency domain is one of the promising methods to provide a non-destructive characterization of charge transport in used cathode.

Czech abstract

Příspěvek představuje metodu pro výrobu a diagnostiku mikroskopických katod na bázi Schottkyho emise. Schottkyho emise začíná stále víc převažovat u zařízení, které používají fokusovaný svazek elektronů, včetně rastrovací mikroskopie (SEM), prozařovací mikroskopie (TEM), Augerových systémů a nástrojů pro diagnostiku polovodičů. Abychom dosáhli dostatečných výsledků je zapotřebí, aby elektronový zdroj splňoval tyto (ideální) parametry: malá velikost zdroje, malý rozptyl energie, nízký šum, dlouhodobá stabilita a hlavně jednoduchý provoz s nízkou cenou. Elektrochemická metoda, která je využita pro přípravu vzorku wolframové katody s ostrým hrotem, společně s vhodnou diagnostickou metodou byla provedena v podmínkách blízkých ultra vysokému vakuu. Šumová spektroskopie v časové a frekvenční rovině přináší slibné výsledky a poskytuje nedestruktivní formou informace transportu náboje v katodě.

English abstract

The paper introduces a method for fabrication and diagnostics of microscopic cathode based on Schottky field emission. Schottky emission is the predominant electron source technology in actual focused electron beam equipment, including scanning electron microscopy (SEM), transmission electron microscopy (TEM), Auger systems, and semiconductor inspection tools. Achieving proper results requires an electron source with the following ideal properties: small source size, low electron emission energy spread, high brightness (beam current per solid angle), low noise and long-term stability, simple and low-cost operation. Electrochemical etching procedure, used for producing extra-sharp tungsten cathode tips, together with suitable noise based analysis method are presented in the paper. Noise diagnostics has been performed on the cathode, under the ultra high vacuum conditions (UHV) in order to provide basic analysis of manufactured cathodes. The noise spectroscopy in time and frequency domain is one of the promising methods to provide a non-destructive characterization of charge transport in used cathode.

Keywords

Schottky cathode, nanotip cathodes, electrochemical etching

Released

04.10.2009

Publisher

National and Kapodistrian University of Athens

Pages from

53

Pages to

53

BibTex


@proceedings{BUT65751,
  author="Alexandr {Knápek} and Lubomír {Grmela}",
  title="Fabrication and Noise Diagnostics of Schottky Nanotip Cathodes",
  annote="The paper introduces a method for fabrication and diagnostics of microscopic cathode based on Schottky field emission. Schottky emission is the predominant electron source technology in actual focused electron beam equipment, including scanning electron microscopy (SEM), transmission electron microscopy (TEM), Auger systems, and semiconductor inspection tools. Achieving proper results requires an electron source with the following ideal properties: small source size, low electron emission energy spread, high brightness (beam current per solid angle), low noise and long-term stability, simple and low-cost operation. Electrochemical etching procedure, used for producing extra-sharp tungsten cathode tips, together with suitable noise based analysis method are presented in the paper. Noise diagnostics has been performed on the cathode, under the ultra high vacuum conditions (UHV) in order to provide basic analysis of manufactured cathodes. The noise spectroscopy in time and frequency domain is one of the promising methods to provide a non-destructive characterization of charge transport in used cathode.",
  address="National and Kapodistrian University of Athens",
  booktitle="Book of Abstracts, IMA 2009 Conference, Athens, October 2009.",
  chapter="65751",
  institution="National and Kapodistrian University of Athens",
  year="2009",
  month="october",
  pages="53--53",
  publisher="National and Kapodistrian University of Athens",
  type="conference proceedings"
}