Publication detail

Correlation between mechanical, optical and chemical properties of thin films deposited by PECVD

ČECH, V. STUDÝNKA, J. ČECHALOVÁ, B. MISTRÍK, J. ZEMEK, J.

Original Title

Correlation between mechanical, optical and chemical properties of thin films deposited by PECVD

Type

lecture

Language

English

Original Abstract

Correlation between mechanical, optical and chemical properties of thin films deposited by PECVD 6th Asian-European International Conference on Plasma Surface Engineering, September 23 - October 1, 2007, Yasuragi-Ioujima Nagasaki, Japan

Authors

ČECH, V.; STUDÝNKA, J.; ČECHALOVÁ, B.; MISTRÍK, J.; ZEMEK, J.

Released

13. 12. 2007

BibTex

@misc{BUT64764,
  author="Vladimír {Čech} and Jan {Studýnka} and Božena {Čechalová} and Jan {Mistrík} and Josef {Zemek}",
  title="Correlation between mechanical, optical and chemical properties of thin films deposited by PECVD",
  year="2007",
  note="lecture"
}