Publication detail

AUTOMATION OF PE-CVD PROCESS FOR PREPARNG OF NANOSTRUCTURED FILMS

PŘIKRYL, R.

Original Title

AUTOMATION OF PE-CVD PROCESS FOR PREPARNG OF NANOSTRUCTURED FILMS

Type

journal article - other

Language

English

Original Abstract

Describes the automation of PE-CVD system used for preparing of nanostructured films of plasma polymer

Keywords

PE-CVD, Automation, plasma, deposition

Authors

PŘIKRYL, R.

RIV year

2008

Released

11. 9. 2008

Publisher

Chemické Listy

Location

Brno

ISBN

1213-7103

Periodical

Chemické listy

Year of study

102

Number

15

State

Czech Republic

Pages from

s1261

Pages to

s1262

Pages count

2

URL

http://www.fch.vutbr.cz/media/chl_2008/papers/8_poly.pdf