Publication detail

Fabrication of nanostructures on Si(100) and GaAs(1 0 0) by local anodic oxidation

ČERVENKA, J. KALOUSEK, R. BARTOŠÍK, M. ŠKODA, D. TOMANEC, O. ŠIKOLA, T.

Original Title

Fabrication of nanostructures on Si(100) and GaAs(1 0 0) by local anodic oxidation

Type

journal article - other

Language

English

Original Abstract

Atomic force microscopes have become useful tools not only for observing surface morphology and nanostructure topography but also for fabrication of various nanostructures itself. In this paper, the application of AFM for fabrication of nanostructures by local anodic oxidation (LAO) of Si(1 0 0) and GaAs(1 0 0) surfaces is presented. A special attention is paid to finding relations between the size of oxide nanolines (height and half-width) and operational parameters as tip-sample voltage and tip writing speed. It was demonstrated that the formation of silicon oxide lines obeys the Cabrera-Mott theory, i.e. the height of the lines grow, linearly with tip-sample voltage and is inversely proportional to logarithm of tip writing speed. As for GaAs substrates, the oxide line height grows linearly with tip-sample voltage as well but LAO exhibits a certain deviation from this theory. It is shown that the selective chemical etching of Si or GaAs ultrathin films processed by LAO makes it possible to use these films as nanolithographic masks for further nanotechnologies, e.g. fabrication of metallic nanostructures by ion-beam bombardment. The ability to control LAO and tip motion can be utilized in fabrication of complex nanostructures finding their applications in nanoelectronic devices, nanophotonics and other high-tech areas.

Keywords

Nanotechnology; Nanostructure fabrication; Local anodic oxidation; AFM

Authors

ČERVENKA, J.; KALOUSEK, R.; BARTOŠÍK, M.; ŠKODA, D.; TOMANEC, O.; ŠIKOLA, T.

RIV year

2006

Released

30. 12. 2006

ISBN

0169-4332

Periodical

Applied Surface Science

Year of study

253

Number

5

State

Kingdom of the Netherlands

Pages from

2373

Pages to

2378

Pages count

6

BibTex

@article{BUT43643,
  author="Jiří {Červenka} and Radek {Kalousek} and Miroslav {Bartošík} and David {Škoda} and Ondřej {Tomanec} and Tomáš {Šikola}",
  title="Fabrication of nanostructures on Si(100) and GaAs(1 0 0) by local anodic oxidation",
  journal="Applied Surface Science",
  year="2006",
  volume="253",
  number="5",
  pages="2373--2378",
  issn="0169-4332"
}