Publication detail

Burning conditions of nonthermal Ar plasma at continuous and pulsed mode

PŘIKRYL, R. STUDÝNKA, J. ČECH, V.

Original Title

Burning conditions of nonthermal Ar plasma at continuous and pulsed mode

Type

journal article - other

Language

English

Original Abstract

A new capacitively coupling system has been developed for the plasma treatment and coating of planar substrates. The system with a bottom rotary electrode and an up- per grounded shower type electrode can be evacuated to the basic vacuum of 10-6 Pa using a turbomolecular pump. A side load lock can be used to feed the bottom electrode by six substrates double-side polished silicon wafer 10x10x0.6mm3) using a magnetic drive. The reactor was equipped by an RF power supply of 1 000W (13.56 MHz) operated in continuous and pulsed mode. The distance between both the electrodes can be posi- tioned from 20mm to 60 mm. Discharge conditions of Ar plasma have been determined with respect to the argon Flow-rate (2 - 50 sccm), pressure (0:5 - 50Pa) and RF power of continuous (1 - 300W) and pulsed (0:1 - 300W) mode for two distances of the elec- trodes (30 and 60 mm). Processing chart pressure vs. power has been constructed in order to found out conditions for stable Ar{plasma. The stability of glow discharge was observed by phototransistor, sensitive in the range 300 - 850 nm. The self-bias of the bottom elec- trode was monitored as a function of the RF power, flow-rate and pressure as well.

Keywords

argon palsma, PECVD technology

Authors

PŘIKRYL, R.; STUDÝNKA, J.; ČECH, V.

RIV year

2006

Released

26. 6. 2006

Publisher

Institute of Physics.. Academy of Sciences of the Czech Republic

Location

Praha CR

ISBN

0011-4626

Periodical

Czechoslovak Journal of Physics

Year of study

56

Number

B

State

Czech Republic

Pages from

1320

Pages to

1325

Pages count

6

BibTex

@article{BUT43252,
  author="Radek {Přikryl} and Jan {Studýnka} and Vladimír {Čech}",
  title="Burning conditions of nonthermal Ar plasma at continuous and pulsed mode",
  journal="Czechoslovak Journal of Physics",
  year="2006",
  volume="56",
  number="B",
  pages="1320--1325",
  issn="0011-4626"
}