Computer Controlled Low Energy SEM

journal article - other

English

In the last two decades the low energy range is employed in the SEM operation for many reasons that include reduced charging of non-conductive specimens, better visualization of surface relief, larger emitted signals and, at very low energies below 100 eV, new families of image contrasts. There fore software for the determination of the critical energy was implemented to the comercial SEM microscope. First results are presented here.

SEM, non-conductors, critical energy

MIKA, F.; RYŠÁVKA, J.; LOPOUR, F.; ZADRAŽIL, M.; MÜLLEROVÁ, I.; FRANK, L.

7. 9. 2003

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