Publication detail

Detection of SEs and BSEs at Higher Pressure

AUTRATA, R., JIRÁK, J., ŠPINKA, J.

Original Title

Detection of SEs and BSEs at Higher Pressure

Type

conference paper

Language

English

Original Abstract

The article deals with the problem of a detection of signal electrons in the scanning electron microscope working at higher pressures in the specimen chamber with an ionization and a scintillation type of detector.

Key words in English

SEM, ESEM, detection of SE and BSE

Authors

AUTRATA, R., JIRÁK, J., ŠPINKA, J.

RIV year

1999

Released

5. 9. 1999

Publisher

University of Veszprém

Location

Veszprém

Pages from

285

Pages to

286

Pages count

2

BibTex

@inproceedings{BUT393,
  author="Rudolf {Autrata} and Josef {Jirák} and Jiří {Špinka}",
  title="Detection of SEs and BSEs at Higher Pressure",
  booktitle="Proceedings of the 4th Multinational Congress on Electron Mi",
  year="1999",
  pages="2",
  publisher="University of Veszprém",
  address="Veszprém"
}