Plasma-Polymerized Thin Films of Hexamethyldisiloxane Prepared at Low RF Power

conference paper

English

The plasma-polymerized HMDSO films were characterized by many techniques suitable to investigate their mechanical and thermal properties, and to determine composition, structure and surface morphology.

thin films, plasma polymerization, FTIR, ESCA/XPS, scratch test, modulus

BÁLKOVÁ, R., PŘIKRYL, R., SALYK, O.

2001

1. 1. 2001

GREMI, CNRS/University of Orleans

Orleans, France

1747

1753

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