Publication detail

Preparation of freestanding carbon nanotubes using plasma enhanced chemical vapor deposition

PEKÁREK, J. VRBA, R. MAGÁT, M. JAŠEK, O.

Original Title

Preparation of freestanding carbon nanotubes using plasma enhanced chemical vapor deposition

English Title

Preparation of freestanding carbon nanotubes using plasma enhanced chemical vapor deposition

Type

conference paper

Language

en

Original Abstract

Carbon nanotubes (CNTs) are molecular-scale tubes of graphitic carbon with outstanding properties. They are among the stiffest and strongest fibers known, and have remarkable electronic properties and many other unique characteristics. In our experiment, CNTs were synthesized using plasma enhanced chemical vapor deposition on the silicon wafer with patterned iron catalytic layer. If the catalyst is uniformly distributed, nanotubes grow everywhere on the substrate. If the catalyst is only located in certain areas (patterned), then nanotubes grow only in those areas. Iron catalytic layers with defined shapes and dimensions were prepared for carbon nanotubes growth. Various dimensions of these shapes were fabricated to monitor influence of catalytic layers. There were produced shapes from 100 nm to 10 um dimensions. Freestanding carbon nanotubes were prepared in our experiment.

English abstract

Carbon nanotubes (CNTs) are molecular-scale tubes of graphitic carbon with outstanding properties. They are among the stiffest and strongest fibers known, and have remarkable electronic properties and many other unique characteristics. In our experiment, CNTs were synthesized using plasma enhanced chemical vapor deposition on the silicon wafer with patterned iron catalytic layer. If the catalyst is uniformly distributed, nanotubes grow everywhere on the substrate. If the catalyst is only located in certain areas (patterned), then nanotubes grow only in those areas. Iron catalytic layers with defined shapes and dimensions were prepared for carbon nanotubes growth. Various dimensions of these shapes were fabricated to monitor influence of catalytic layers. There were produced shapes from 100 nm to 10 um dimensions. Freestanding carbon nanotubes were prepared in our experiment.

Keywords

Carbon nanotubes, Plasma enhanced chemical vapor deposition, Catalyst

RIV year

2011

Released

11.05.2011

Publisher

Technical University of Košice

Location

Košice

ISBN

978-1-4577-2112-0

Book

ISSE 2011, 34th International Spring Seminar on Electronics Technology, Conference Proceedings

Edition

1

Edition number

1

Pages from

515

Pages to

518

Pages count

4

URL

Documents

BibTex


@inproceedings{BUT36226,
  author="Jan {Pekárek} and Radimír {Vrba} and Martin {Magát} and Ondřej {Jašek}",
  title="Preparation of freestanding carbon nanotubes using plasma enhanced chemical vapor deposition",
  annote="Carbon nanotubes (CNTs) are molecular-scale tubes of graphitic carbon with outstanding properties. They are among the stiffest and strongest fibers known, and have remarkable electronic properties and many other unique characteristics. In our experiment, CNTs were synthesized using plasma enhanced chemical vapor deposition on the silicon wafer with patterned iron catalytic layer. If the catalyst is uniformly distributed, nanotubes grow everywhere on the substrate. If the catalyst is only located in certain areas (patterned), then nanotubes grow only in those areas. Iron catalytic layers with defined shapes and dimensions were prepared for carbon nanotubes growth. Various dimensions of these shapes were fabricated to monitor influence of catalytic layers. There were produced shapes from 100 nm to 10 um dimensions. Freestanding carbon nanotubes were prepared in our experiment.",
  address="Technical University of Košice",
  booktitle="ISSE 2011, 34th International Spring Seminar on Electronics Technology, Conference Proceedings",
  chapter="36226",
  edition="1",
  howpublished="print",
  institution="Technical University of Košice",
  year="2011",
  month="may",
  pages="515--518",
  publisher="Technical University of Košice",
  type="conference paper"
}