Publication detail

A simplified local surface photoreflectance measurement

BENEŠOVÁ, M., TOMÁNEK, P., DOBIS, P., GRMELA, L.

Original Title

A simplified local surface photoreflectance measurement

Czech Title

Zjednodušená metoda lokálního měření fotoodrazivosti povrchu

English Title

A simplified local surface photoreflectance measurement

Type

conference paper

Language

en

Original Abstract

A simple and economical photoreflectance measurement that can easily be adapted to conventional scanning optical microscopes is presented. In this design, the laser source is sine-wave modulated so that the second harmonic modulation distorsion within the optical probe beam before and after reflection off the sample surface can be monitored. The desired photoreflectance measurement, which is taken as the change of reflectance as a result of varying the incident optical power, is then obtained from the change in the ration of the fundamental and second-harmonic signals. The set-up and technique by measuring the implantation damage in nitrogen-implanted silicon samples is demonstrated.

English abstract

A simple and economical photoreflectance measurement that can easily be adapted to conventional scanning optical microscopes is presented. In this design, the laser source is sine-wave modulated so that the second harmonic modulation distorsion within the optical probe beam before and after reflection off the sample surface can be monitored. The desired photoreflectance measurement, which is taken as the change of reflectance as a result of varying the incident optical power, is then obtained from the change in the ration of the fundamental and second-harmonic signals. The set-up and technique by measuring the implantation damage in nitrogen-implanted silicon samples is demonstrated.

Keywords

Reflectance, laser reflectivity, material surface characterization, optical near field, near-field scanning optical microscopy.

RIV year

2001

Released

27.06.2001

Publisher

VUTIUM

Location

Brno

ISBN

80-214-1892-3

Book

Proceedings of Materials structure and micromechanics fracture

Pages from

439

Pages to

444

Pages count

6

BibTex


@inproceedings{BUT3348,
  author="Markéta {Benešová} and Pavel {Tománek} and Pavel {Dobis} and Lubomír {Grmela}",
  title="A simplified local surface photoreflectance measurement",
  annote="A simple and economical photoreflectance measurement that can easily be adapted to conventional scanning optical microscopes is presented. In this design, the laser source is sine-wave modulated so that the second harmonic modulation distorsion within the optical probe beam before and after reflection off the sample surface can be monitored. The desired photoreflectance measurement, which is taken as the change of reflectance as a result of varying the incident optical power, is then obtained from the change in the ration of the fundamental and second-harmonic signals. The set-up and technique by measuring the implantation damage in nitrogen-implanted silicon samples is demonstrated.",
  address="VUTIUM",
  booktitle="Proceedings of Materials structure and micromechanics fracture",
  chapter="3348",
  institution="VUTIUM",
  year="2001",
  month="june",
  pages="439",
  publisher="VUTIUM",
  type="conference paper"
}