Publication detail

Experimental study of MEMS capacitive sensor

PEKÁREK, J. VRBA, R. FICEK, R. MAGÁT, M.

Original Title

Experimental study of MEMS capacitive sensor

English Title

Experimental study of MEMS capacitive sensor

Type

conference paper

Language

en

Original Abstract

This paper describes a new approach to pressure sensors development using capacitive principle. Novel pressure sensor has been achieved utilizing carbon nanotubes (CNTs) arrays as the surface increase element in capacitive sensor.

English abstract

This paper describes a new approach to pressure sensors development using capacitive principle. Novel pressure sensor has been achieved utilizing carbon nanotubes (CNTs) arrays as the surface increase element in capacitive sensor.

Keywords

Pressure sensor, capacity, carbon nanotubes, plasma enhanced chemical vapor deposition

RIV year

2009

Released

02.09.2009

Publisher

Vysoké učení technické v Brně, Antonínská 548/1

Location

Brno

ISBN

978-80-214-3933-7

Book

EDS'09 IMAPS CS International Conference Proceedings

Edition number

1

Pages from

205

Pages to

209

Pages count

5

Documents

BibTex


@inproceedings{BUT31908,
  author="Jan {Pekárek} and Radimír {Vrba} and Richard {Ficek} and Martin {Magát}",
  title="Experimental study of MEMS capacitive sensor",
  annote="This paper describes a new approach to pressure sensors development using capacitive principle. Novel pressure sensor has been achieved utilizing carbon nanotubes (CNTs) arrays as the surface increase element in capacitive sensor.",
  address="Vysoké učení technické v Brně, Antonínská 548/1",
  booktitle="EDS'09 IMAPS CS International Conference Proceedings",
  chapter="31908",
  howpublished="print",
  institution="Vysoké učení technické v Brně, Antonínská 548/1",
  year="2009",
  month="september",
  pages="205--209",
  publisher="Vysoké učení technické v Brně, Antonínská 548/1",
  type="conference paper"
}