Publication detail

Comparison of AFM and optical methods at measuring nanometric surface roughness

OHLÍDAL, I., FRANTA, D., OHLÍDAL, M., VIČAR, M., KLAPETEK, P.

Original Title

Comparison of AFM and optical methods at measuring nanometric surface roughness

Type

conference paper

Language

English

Authors

OHLÍDAL, I., FRANTA, D., OHLÍDAL, M., VIČAR, M., KLAPETEK, P.

Released

1. 11. 1998

Publisher

Physikalisch-Technische Bunesanstalt Ferrtiungsmestechnik

Location

Braunschweig, Germany

ISBN

3-89701-280-4

Book

PTB - Bericht F-34

Pages from

123

Pages to

129

Pages count

7

BibTex

@inproceedings{BUT21567,
  author="Ivan {Ohlídal} and Daniel {Franta} and Miloslav {Ohlídal} and Miroslav {Vičar} and Petr {Klapetek}",
  title="Comparison of AFM and optical methods at measuring nanometric surface roughness",
  booktitle="PTB - Bericht F-34",
  year="1998",
  pages="7",
  publisher="Physikalisch-Technische Bunesanstalt Ferrtiungsmestechnik",
  address="Braunschweig, Germany",
  isbn="3-89701-280-4"
}