Publication detail

Mass sensing using micromechanical resonators operating in nonlinear regime

VENSKÝ, J. ŠEVEČEK, O. SKALKA, P. KOTOUL, M. STACHIV, I.

Original Title

Mass sensing using micromechanical resonators operating in nonlinear regime

Type

conference paper

Language

English

Original Abstract

The contribution deals with a numerical modelling and analysis of micro/nano-mechanical resonators operating in the non-linear regime which is intended to be utilized for an enhancement of the resonator sensing range eventually its sensitivity. Standardly the mass spectrometry is performed using the linearly operated resonators, which have however number of limitations. One of the main is a low accuracy of mass detection when particle is too heavy or light with respect to the resonator mass. An alternative way to this approach solving the mentioned drawback is presented here. The particle mass is characterized just from the change of the first resonant frequency and from the maximal vibrational amplitude in the resonators center upon crossing the resonant frequency. Attention is paid also to an analysis of the resonatoŕs mechanical reliability upon its operation.

Keywords

Micromechanical resonator, nonlinear vibrations, mass spectrometry, FEM

Authors

VENSKÝ, J.; ŠEVEČEK, O.; SKALKA, P.; KOTOUL, M.; STACHIV, I.

Released

9. 12. 2022

Publisher

IEEE

Location

Pilsen, Czech Republic

ISBN

978-1-6654-1040-3

Book

2022 20th International Conference on Mechatronics - Mechatronika (ME)

Pages count

4

URL

https://ieeexplore.ieee.org/document/9983052

BibTex

@inproceedings{BUT182226,
  author="Jiří {Venský} and Oldřich {Ševeček} and Petr {Skalka} and Michal {Kotoul} and Ivo {Stachiv}",
  title="Mass sensing using micromechanical resonators operating in nonlinear regime",
  booktitle="2022 20th International Conference on Mechatronics - Mechatronika (ME)",
  year="2022",
  pages="4",
  publisher="IEEE",
  address="Pilsen, Czech Republic",
  doi="10.1109/ME54704.2022.9983052",
  isbn="978-1-6654-1040-3",
  url="https://ieeexplore.ieee.org/document/9983052"
}