Publication detail

A Sub-nL Chip Calorimeter and Its Application to the Measurement of the Photothermal Transduction Efficiency of Plasmonic Nanoparticles

NI, S. BU, Y. ZHU, H. NEUŽIL, P. YOBAS, L.

Original Title

A Sub-nL Chip Calorimeter and Its Application to the Measurement of the Photothermal Transduction Efficiency of Plasmonic Nanoparticles

Type

journal article in Web of Science

Language

English

Original Abstract

Here, we introduce a microchip for differential measurements of aqueous samples in twin calorimetric arms with a sub-nL enclosed space. Each arm features a fluidic microchannel located in close proximity to a thin-film resistance thermometer and heater patterned on a low-stress SiN membrane held over a Si cavity with suspension beams. The chip exhibits a rapid response with a thermal time constant of less than 10 ms in atmosphere and a residual thermal conductance below 6 mu W.K-1, one of the lowest reported and accounts for the excellent sensitivity registered in vacuum up to 11 V.W-1. These values are in good agreement with those ones predicted by modeling using finite element method, lumped-capacitance analysis, and calorimeter electrothermal circuit simulation together with the measurement system. Long suspension beams in each arm ensure uniform temperature maintained across its membrane as revealed by the fluorescence-based melting curve analysis. We share the specific heat capacity values of water, glycerin, and mineral oil accurately measured by the chip. Lastly, we demonstrate the chip calorimeter utility on the measurement of the photothermal transduction efficiency of plasmonic nanoparticles, which makes our study further unique in expanding the applications of chip calorimeters.

Keywords

Calorimetry; microelectromechanical systems; microfabrication; nanoparticles; photothermal effects; plasmonic

Authors

NI, S.; BU, Y.; ZHU, H.; NEUŽIL, P.; YOBAS, L.

Released

1. 10. 2021

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC

Location

PISCATAWAY

ISBN

1057-7157

Periodical

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Year of study

30

Number

5

State

United States of America

Pages from

759

Pages to

769

Pages count

11

URL

BibTex

@article{BUT172855,
  author="NI, S. and BU, Y. and ZHU, H. and NEUŽIL, P. and YOBAS, L.",
  title="A Sub-nL Chip Calorimeter and Its Application to the Measurement of the Photothermal Transduction Efficiency of Plasmonic Nanoparticles",
  journal="JOURNAL OF MICROELECTROMECHANICAL SYSTEMS",
  year="2021",
  volume="30",
  number="5",
  pages="759--769",
  doi="10.1109/JMEMS.2021.3096524",
  issn="1057-7157",
  url="https://ieeexplore.ieee.org/document/9494100"
}