Publication detail

Analysis of the Impact of the Conic Aperture in the Differentially Pumped Chamber.

MAXA, J. HLAVATÁ, P. VYROUBAL, P.

Original Title

Analysis of the Impact of the Conic Aperture in the Differentially Pumped Chamber.

English Title

Analysis of the Impact of the Conic Aperture in the Differentially Pumped Chamber.

Type

journal article

Language

en

Original Abstract

The article is focused on the medium dynamics simulation in the environmental scanning electron microscope. Specifically, it researches (examines) the conical aperture location effect in the differential pumped chamber and the width of the pumping channel in this chamber. The problem was solved in the Ansys Fluent system using mechanism of continuum and finite volume method. The problem is solved according to the Taylor – Maccoll theory about the impact of the shock wave.

English abstract

The article is focused on the medium dynamics simulation in the environmental scanning electron microscope. Specifically, it researches (examines) the conical aperture location effect in the differential pumped chamber and the width of the pumping channel in this chamber. The problem was solved in the Ansys Fluent system using mechanism of continuum and finite volume method. The problem is solved according to the Taylor – Maccoll theory about the impact of the shock wave.

Keywords

Environmental scanning electron microscope (ESEM), ANSYS Fluent, finite volume method, Differentially pumped chamber, Taylor – Maccoll theory.

Released

26.10.2018

Publisher

University of Defence

Location

Brno

Pages from

50

Pages to

61

Pages count

12

BibTex


@article{BUT150566,
  author="Jiří {Maxa} and Pavla {Šabacká} and Petr {Vyroubal}",
  title="Analysis of the Impact of the Conic Aperture in the Differentially Pumped Chamber.",
  annote="The article is focused on the medium dynamics simulation in the environmental scanning electron microscope. Specifically, it researches (examines) the conical aperture location effect in the differential pumped chamber and the width of the pumping channel in this chamber. The problem was solved in the Ansys Fluent system using mechanism of continuum and finite volume method. The problem is solved according to the Taylor – Maccoll theory about the impact of the shock wave.",
  address="University of Defence",
  chapter="150566",
  howpublished="print",
  institution="University of Defence",
  number="1",
  year="2018",
  month="october",
  pages="50--61",
  publisher="University of Defence",
  type="journal article"
}