Publication detail

Scale-dependent Choice of Scanning Rate for AFM Measurements

TALU, S. SOBOLA, D. SOLAYMANI, S. DALLAEV, R. BRÜSTLOVÁ, J.

Original Title

Scale-dependent Choice of Scanning Rate for AFM Measurements

English Title

Scale-dependent Choice of Scanning Rate for AFM Measurements

Type

conference paper

Language

en

Original Abstract

Three samples with different high of topography features were measured at different scanning rate. We also presented statistical and fractal analyses for definition of the surface morphometrics. They can be used for calculation and evaluation of the images' distortion that takes place during scanning rate and proved to be helpful while controlling the measurement. Basing on the results we came to the conclusion that fractal analysis, the statistical surface roughness parameters and AFM may provide us with a deeper understanding of the physical phenomena taking place in the sample-tip interface. This is why, fractal analysis and statistical surface roughness parameters are useful information for the further improvement of calibration system. This approach can be applied for choosing scanning parameters properly, taking into consideration the geometry of the sample and for the microscope calibration by geometrical sizes of features

English abstract

Three samples with different high of topography features were measured at different scanning rate. We also presented statistical and fractal analyses for definition of the surface morphometrics. They can be used for calculation and evaluation of the images' distortion that takes place during scanning rate and proved to be helpful while controlling the measurement. Basing on the results we came to the conclusion that fractal analysis, the statistical surface roughness parameters and AFM may provide us with a deeper understanding of the physical phenomena taking place in the sample-tip interface. This is why, fractal analysis and statistical surface roughness parameters are useful information for the further improvement of calibration system. This approach can be applied for choosing scanning parameters properly, taking into consideration the geometry of the sample and for the microscope calibration by geometrical sizes of features

Keywords

Fractal dimension, Micromorphology, Statistical parameters, Topography

Released

18.07.2018

Publisher

EStech Transactions on Computer Science and Engineering

ISBN

978-1-60595-065-5

Book

DEStech Transactions on Computer Science and Engineering

Pages from

453

Pages to

459

Pages count

7

URL

Documents

BibTex


@inproceedings{BUT148890,
  author="Stefan {Talu} and Dinara {Sobola} and Shahram {Solaymani} and Rashid {Dallaev} and Jitka {Brüstlová}",
  title="Scale-dependent Choice of Scanning Rate for AFM Measurements",
  annote="Three samples with different high of topography features were measured at different scanning rate. We also presented statistical and fractal analyses for definition of the surface morphometrics. They can be used for calculation and evaluation of the images' distortion that takes place during scanning rate and proved to be helpful while controlling the measurement. Basing on the results we came to the conclusion that fractal analysis, the statistical surface roughness parameters and AFM may provide us with a deeper understanding of the physical phenomena taking place in the sample-tip interface. This is why, fractal analysis and statistical surface roughness parameters are useful information for the further improvement of calibration system. This approach can be applied for choosing scanning parameters properly, taking into consideration the geometry of the sample and for the microscope calibration by geometrical sizes of features",
  address="EStech Transactions on Computer Science and Engineering",
  booktitle="DEStech Transactions on Computer Science and Engineering",
  chapter="148890",
  doi="10.12783/dtcse/cnai2018/24197",
  howpublished="online",
  institution="EStech Transactions on Computer Science and Engineering",
  year="2018",
  month="july",
  pages="453--459",
  publisher="EStech Transactions on Computer Science and Engineering",
  type="conference paper"
}