Publication detail

NOISE AND STEP HEIGHT PERFORMANCE OF SELECTED OPTICAL SURFACE MEASURING INSTRUMENTS

HARČARÍK, M. JANKOVÝCH, R.

Original Title

NOISE AND STEP HEIGHT PERFORMANCE OF SELECTED OPTICAL SURFACE MEASURING INSTRUMENTS

Type

journal article in Scopus

Language

English

Original Abstract

Increasing demands for manufacturing quality and new standards in surface metrology foreshadow a widespread adoption of 3D surface topography measurement in manufacturing quality control. This raises the question of instrument selection. Coherence scanning interferometry and laser scanning confocal microscopy are some of the most common technologies in optical measurement of surface topography. These methods differ significantly in their suitability for different types of measurement. This article provides a comparison of the measurement noise and step height measurement performance two measuring instruments based on these two principles in relation to objectives used for measurement. Such data can be used to inform instrument selection in an industrial environment.

Keywords

surface texture, confocal microscopy, coherence scanning interferometry, comparison of instruments, topography measurement noise, step height repeatability

Authors

HARČARÍK, M.; JANKOVÝCH, R.

Released

13. 12. 2017

Publisher

MM (Modern Machinery) Science Journal

Location

Praha

ISBN

1805-0476

Periodical

MM Science Journal

Year of study

2017

Number

5

State

Czech Republic

Pages from

2030

Pages to

2034

Pages count

5

URL

http://doi.org./10.17973/MMSJ.2017_12_201727

BibTex

@article{BUT142924,
  author="Matej {Harčarík} and Róbert {Jankových}",
  title="NOISE AND STEP HEIGHT PERFORMANCE OF SELECTED OPTICAL SURFACE MEASURING INSTRUMENTS",
  journal="MM Science Journal",
  year="2017",
  volume="2017",
  number="5",
  pages="2030--2034",
  doi="10.17973/MMSJ.2017\{_}12\{_}201781",
  issn="1805-0476",
  url="http://doi.org./10.17973/MMSJ.2017_12_201727"
}