Publication detail

Sputtered and screen-printed metal oxide-based integrated micro-sensor arrays for the quantitative analysis of gas mixtures

STANKOVA, M., IVANOV, P., LLOBET, E., BREZMES, J., VILANOVA, X., GRACIA, I., CANÉ, C., HUBÁLEK, J., MALYSZ, K., CORREIG, X.

Original Title

Sputtered and screen-printed metal oxide-based integrated micro-sensor arrays for the quantitative analysis of gas mixtures

Type

conference paper

Language

English

Original Abstract

Either by screen-printing or sputtering, sensitive layers of nanoparticle tin oxide were deposited on silicon micromachined substrates. The procedures allow the deposition of sensing layers before membranes have been etched, which leads to gas micro-sensors with an excellent fabrication yield. The sensor response to ethanol, acetone and ammonia vapours and their binary mixtures was studied. By using an integrated array of 4 microsensors operated at two different temperatures and a fuzzy ARTMAP neural network, it was possible to identify and quantify the different species (success rate was 100%). These results confirm the viability of the techniques introduced to obtain micromachined sensors suitable for battery-powered gas/vapour monitors.

Keywords

metal oxide, r.f. sputtering, screen-printing, micromachined array, quantitative gas analysis

Authors

STANKOVA, M., IVANOV, P., LLOBET, E., BREZMES, J., VILANOVA, X., GRACIA, I., CANÉ, C., HUBÁLEK, J., MALYSZ, K., CORREIG, X.

Released

24. 9. 2003

Location

Guimarăes, Portugalsko

ISBN

972-98603-1-9

Pages from

1111

Pages to

1113

Pages count

3

BibTex

@inproceedings{BUT13203,
  author="Mariana {Stankova} and Peter {Ivanov} and Eduard {Llobet} and Jesús {Brezmes} and Xavier {Vilanova} and I. {Gracia} and Carlas {Cané} and Jaromír {Hubálek} and Karel {Malysz} and Xavier {Correig}",
  title="Sputtered and screen-printed metal oxide-based integrated micro-sensor arrays for the quantitative analysis of gas mixtures",
  year="2003",
  pages="3",
  address="Guimarăes, Portugalsko",
  isbn="972-98603-1-9"
}