Publication detail

Design and Fabrication of Fully Implantable MEMS Cochlea

SVATOŠ, V. PEKÁREK, J. DUŠEK, D. ŽÁK, J. HADAŠ, Z. PRÁŠEK, J.

Original Title

Design and Fabrication of Fully Implantable MEMS Cochlea

English Title

Design and Fabrication of Fully Implantable MEMS Cochlea

Type

conference paper

Language

en

Original Abstract

The micro-electro-mechanical array for application as fully implantable cochlea is presented in this paper. The complete system including a short overview of energy harvesting and the system configuration is proposed. This study mainly covers mechanical properties of cochlea microfabricated silicon structure. Electro-mechanical simulations are proceeded to optimize the material used for resonators, the size of array membranes and to estimate the resistive change due to the input sound signal. The sound is detected by thin SiXNY diaphragm due to resonant frequency and the displacement of the membrane caused by acoustic pressure. The displacement is detected employing piezoresistive electrodes (NiCr). Design and fabrication process based on MEMS technology are described and discussed. The response measurement of the cochlea structure is performed.

English abstract

The micro-electro-mechanical array for application as fully implantable cochlea is presented in this paper. The complete system including a short overview of energy harvesting and the system configuration is proposed. This study mainly covers mechanical properties of cochlea microfabricated silicon structure. Electro-mechanical simulations are proceeded to optimize the material used for resonators, the size of array membranes and to estimate the resistive change due to the input sound signal. The sound is detected by thin SiXNY diaphragm due to resonant frequency and the displacement of the membrane caused by acoustic pressure. The displacement is detected employing piezoresistive electrodes (NiCr). Design and fabrication process based on MEMS technology are described and discussed. The response measurement of the cochlea structure is performed.

Keywords

Cochlear implant; MEMS; proceeding electronics; fabrication; simulation; diaphragm

RIV year

2015

Released

02.01.2015

Publisher

Elsevier

Location

Vienna

ISBN

978-3-901509-99-5

Book

Proceeedings of DAAAM International Symposium on Intelligent Manufacturing and Automation 2014

Pages from

1224

Pages to

1231

Pages count

8

URL

Full text in the Digital Library

Documents

BibTex


@inproceedings{BUT114544,
  author="Vojtěch {Svatoš} and Jan {Pekárek} and Daniel {Dušek} and Jaromír {Žák} and Zdeněk {Hadaš} and Jan {Prášek}",
  title="Design and Fabrication of Fully Implantable MEMS Cochlea",
  annote="The micro-electro-mechanical array for application as fully implantable cochlea is presented in this paper. The complete system including a short overview of energy harvesting and the system configuration is proposed. This study mainly covers mechanical properties of cochlea microfabricated silicon structure. Electro-mechanical simulations are proceeded to optimize the material used for resonators, the size of array membranes and to estimate the resistive change due to the input sound signal. The sound is detected by thin SiXNY diaphragm due to resonant frequency and the displacement of the membrane caused by acoustic pressure. The displacement is detected employing piezoresistive electrodes (NiCr). Design and fabrication process based on MEMS technology are described and discussed. The response measurement of the cochlea structure is performed.",
  address="Elsevier",
  booktitle="Proceeedings of DAAAM International Symposium on Intelligent Manufacturing and Automation 2014",
  chapter="114544",
  doi="10.1016/j.proeng.2015.01.487",
  howpublished="online",
  institution="Elsevier",
  number="1",
  year="2015",
  month="january",
  pages="1224--1231",
  publisher="Elsevier",
  type="conference paper"
}